JPS6364028U - - Google Patents
Info
- Publication number
- JPS6364028U JPS6364028U JP15762386U JP15762386U JPS6364028U JP S6364028 U JPS6364028 U JP S6364028U JP 15762386 U JP15762386 U JP 15762386U JP 15762386 U JP15762386 U JP 15762386U JP S6364028 U JPS6364028 U JP S6364028U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- solution
- storage body
- crystal growth
- liquid phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 13
- 239000013078 crystal Substances 0.000 claims description 8
- 239000007791 liquid phase Substances 0.000 claims description 6
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986157623U JP2507709Y2 (ja) | 1986-10-14 | 1986-10-14 | 液相結晶成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986157623U JP2507709Y2 (ja) | 1986-10-14 | 1986-10-14 | 液相結晶成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6364028U true JPS6364028U (cs) | 1988-04-27 |
| JP2507709Y2 JP2507709Y2 (ja) | 1996-08-21 |
Family
ID=31080343
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986157623U Expired - Lifetime JP2507709Y2 (ja) | 1986-10-14 | 1986-10-14 | 液相結晶成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2507709Y2 (cs) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS547861A (en) * | 1977-06-21 | 1979-01-20 | Fujitsu Ltd | Liquid phase epitaxial growth method |
-
1986
- 1986-10-14 JP JP1986157623U patent/JP2507709Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS547861A (en) * | 1977-06-21 | 1979-01-20 | Fujitsu Ltd | Liquid phase epitaxial growth method |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2507709Y2 (ja) | 1996-08-21 |