JPS636193U - - Google Patents
Info
- Publication number
- JPS636193U JPS636193U JP1986100078U JP10007886U JPS636193U JP S636193 U JPS636193 U JP S636193U JP 1986100078 U JP1986100078 U JP 1986100078U JP 10007886 U JP10007886 U JP 10007886U JP S636193 U JPS636193 U JP S636193U
- Authority
- JP
- Japan
- Prior art keywords
- tray
- trays
- substrates
- axis
- processing machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007246 mechanism Effects 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986100078U JPS636193U (th) | 1986-06-30 | 1986-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986100078U JPS636193U (th) | 1986-06-30 | 1986-06-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS636193U true JPS636193U (th) | 1988-01-16 |
Family
ID=30969556
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986100078U Pending JPS636193U (th) | 1986-06-30 | 1986-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS636193U (th) |
-
1986
- 1986-06-30 JP JP1986100078U patent/JPS636193U/ja active Pending
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