JPS6361748U - - Google Patents
Info
- Publication number
- JPS6361748U JPS6361748U JP15578086U JP15578086U JPS6361748U JP S6361748 U JPS6361748 U JP S6361748U JP 15578086 U JP15578086 U JP 15578086U JP 15578086 U JP15578086 U JP 15578086U JP S6361748 U JPS6361748 U JP S6361748U
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- extraction electrodes
- beam extraction
- support member
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15578086U JPS6361748U (en:Method) | 1986-10-13 | 1986-10-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15578086U JPS6361748U (en:Method) | 1986-10-13 | 1986-10-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6361748U true JPS6361748U (en:Method) | 1988-04-23 |
Family
ID=31076791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15578086U Pending JPS6361748U (en:Method) | 1986-10-13 | 1986-10-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6361748U (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03222241A (ja) * | 1990-01-25 | 1991-10-01 | Tokyo Electron Ltd | イオン源装置 |
-
1986
- 1986-10-13 JP JP15578086U patent/JPS6361748U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03222241A (ja) * | 1990-01-25 | 1991-10-01 | Tokyo Electron Ltd | イオン源装置 |