JPS6361122U - - Google Patents
Info
- Publication number
- JPS6361122U JPS6361122U JP15588186U JP15588186U JPS6361122U JP S6361122 U JPS6361122 U JP S6361122U JP 15588186 U JP15588186 U JP 15588186U JP 15588186 U JP15588186 U JP 15588186U JP S6361122 U JPS6361122 U JP S6361122U
- Authority
- JP
- Japan
- Prior art keywords
- diffusion furnace
- semiconductor manufacturing
- inert gas
- cover
- loading mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims description 8
- 239000011261 inert gas Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000007789 gas Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15588186U JPS6361122U (enExample) | 1986-10-09 | 1986-10-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15588186U JPS6361122U (enExample) | 1986-10-09 | 1986-10-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6361122U true JPS6361122U (enExample) | 1988-04-22 |
Family
ID=31076983
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15588186U Pending JPS6361122U (enExample) | 1986-10-09 | 1986-10-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6361122U (enExample) |
-
1986
- 1986-10-09 JP JP15588186U patent/JPS6361122U/ja active Pending
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