JPS6294637U - - Google Patents

Info

Publication number
JPS6294637U
JPS6294637U JP18713685U JP18713685U JPS6294637U JP S6294637 U JPS6294637 U JP S6294637U JP 18713685 U JP18713685 U JP 18713685U JP 18713685 U JP18713685 U JP 18713685U JP S6294637 U JPS6294637 U JP S6294637U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
wafer processing
sent
stored
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18713685U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18713685U priority Critical patent/JPS6294637U/ja
Publication of JPS6294637U publication Critical patent/JPS6294637U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Intermediate Stations On Conveyors (AREA)
  • Specific Conveyance Elements (AREA)
JP18713685U 1985-12-04 1985-12-04 Pending JPS6294637U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18713685U JPS6294637U (enExample) 1985-12-04 1985-12-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18713685U JPS6294637U (enExample) 1985-12-04 1985-12-04

Publications (1)

Publication Number Publication Date
JPS6294637U true JPS6294637U (enExample) 1987-06-17

Family

ID=31137331

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18713685U Pending JPS6294637U (enExample) 1985-12-04 1985-12-04

Country Status (1)

Country Link
JP (1) JPS6294637U (enExample)

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