JPS6186924U - - Google Patents
Info
- Publication number
- JPS6186924U JPS6186924U JP1984171303U JP17130384U JPS6186924U JP S6186924 U JPS6186924 U JP S6186924U JP 1984171303 U JP1984171303 U JP 1984171303U JP 17130384 U JP17130384 U JP 17130384U JP S6186924 U JPS6186924 U JP S6186924U
- Authority
- JP
- Japan
- Prior art keywords
- paddle
- wafer
- boat
- tip
- board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984171303U JPS6186924U (enExample) | 1984-11-12 | 1984-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984171303U JPS6186924U (enExample) | 1984-11-12 | 1984-11-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6186924U true JPS6186924U (enExample) | 1986-06-07 |
Family
ID=30728995
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984171303U Pending JPS6186924U (enExample) | 1984-11-12 | 1984-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6186924U (enExample) |
-
1984
- 1984-11-12 JP JP1984171303U patent/JPS6186924U/ja active Pending
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