JPS6361120U - - Google Patents
Info
- Publication number
- JPS6361120U JPS6361120U JP15520786U JP15520786U JPS6361120U JP S6361120 U JPS6361120 U JP S6361120U JP 15520786 U JP15520786 U JP 15520786U JP 15520786 U JP15520786 U JP 15520786U JP S6361120 U JPS6361120 U JP S6361120U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- cvd apparatus
- mounting table
- vertical cvd
- sample mounting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986155207U JP2513180Y2 (ja) | 1986-10-09 | 1986-10-09 | 縦型ｃｖｄ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986155207U JP2513180Y2 (ja) | 1986-10-09 | 1986-10-09 | 縦型ｃｖｄ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6361120U true JPS6361120U (no) | 1988-04-22 |
| JP2513180Y2 JP2513180Y2 (ja) | 1996-10-02 |
Family
ID=31075707
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986155207U Expired - Lifetime JP2513180Y2 (ja) | 1986-10-09 | 1986-10-09 | 縦型ｃｖｄ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2513180Y2 (no) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57207332A (en) * | 1981-06-15 | 1982-12-20 | Toshiba Corp | Pressure reducing cvd device |
-
1986
- 1986-10-09 JP JP1986155207U patent/JP2513180Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57207332A (en) * | 1981-06-15 | 1982-12-20 | Toshiba Corp | Pressure reducing cvd device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2513180Y2 (ja) | 1996-10-02 |