JPS6284926U - - Google Patents
Info
- Publication number
- JPS6284926U JPS6284926U JP17700785U JP17700785U JPS6284926U JP S6284926 U JPS6284926 U JP S6284926U JP 17700785 U JP17700785 U JP 17700785U JP 17700785 U JP17700785 U JP 17700785U JP S6284926 U JPS6284926 U JP S6284926U
- Authority
- JP
- Japan
- Prior art keywords
- quartz tube
- molecular beam
- heater
- heats
- small balls
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 239000013078 crystal Substances 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17700785U JPS6284926U (no) | 1985-11-18 | 1985-11-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17700785U JPS6284926U (no) | 1985-11-18 | 1985-11-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6284926U true JPS6284926U (no) | 1987-05-30 |
Family
ID=31117799
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17700785U Pending JPS6284926U (no) | 1985-11-18 | 1985-11-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6284926U (no) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0439919A (ja) * | 1990-06-05 | 1992-02-10 | Matsushita Electric Ind Co Ltd | 熱分解セル |
-
1985
- 1985-11-18 JP JP17700785U patent/JPS6284926U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0439919A (ja) * | 1990-06-05 | 1992-02-10 | Matsushita Electric Ind Co Ltd | 熱分解セル |