JPS6360291U - - Google Patents
Info
- Publication number
- JPS6360291U JPS6360291U JP15320686U JP15320686U JPS6360291U JP S6360291 U JPS6360291 U JP S6360291U JP 15320686 U JP15320686 U JP 15320686U JP 15320686 U JP15320686 U JP 15320686U JP S6360291 U JPS6360291 U JP S6360291U
- Authority
- JP
- Japan
- Prior art keywords
- heating
- heater block
- ceramic
- temperature
- heating device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 13
- 239000000919 ceramic Substances 0.000 claims 4
- 238000003475 lamination Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Control Of Resistance Heating (AREA)
- Resistance Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15320686U JPS6360291U (me) | 1986-10-07 | 1986-10-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15320686U JPS6360291U (me) | 1986-10-07 | 1986-10-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6360291U true JPS6360291U (me) | 1988-04-21 |
Family
ID=31071884
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15320686U Pending JPS6360291U (me) | 1986-10-07 | 1986-10-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6360291U (me) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54158738A (en) * | 1978-05-24 | 1979-12-14 | Hitachi Chem Co Ltd | Ceramic heater |
-
1986
- 1986-10-07 JP JP15320686U patent/JPS6360291U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54158738A (en) * | 1978-05-24 | 1979-12-14 | Hitachi Chem Co Ltd | Ceramic heater |