JPS6360114B2 - - Google Patents

Info

Publication number
JPS6360114B2
JPS6360114B2 JP19312584A JP19312584A JPS6360114B2 JP S6360114 B2 JPS6360114 B2 JP S6360114B2 JP 19312584 A JP19312584 A JP 19312584A JP 19312584 A JP19312584 A JP 19312584A JP S6360114 B2 JPS6360114 B2 JP S6360114B2
Authority
JP
Japan
Prior art keywords
hearth
vacuum
block
bellows
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP19312584A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6169963A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19312584A priority Critical patent/JPS6169963A/ja
Publication of JPS6169963A publication Critical patent/JPS6169963A/ja
Publication of JPS6360114B2 publication Critical patent/JPS6360114B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP19312584A 1984-09-14 1984-09-14 蒸着用電子銃装置 Granted JPS6169963A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19312584A JPS6169963A (ja) 1984-09-14 1984-09-14 蒸着用電子銃装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19312584A JPS6169963A (ja) 1984-09-14 1984-09-14 蒸着用電子銃装置

Publications (2)

Publication Number Publication Date
JPS6169963A JPS6169963A (ja) 1986-04-10
JPS6360114B2 true JPS6360114B2 (enExample) 1988-11-22

Family

ID=16302676

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19312584A Granted JPS6169963A (ja) 1984-09-14 1984-09-14 蒸着用電子銃装置

Country Status (1)

Country Link
JP (1) JPS6169963A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63290265A (ja) * 1987-05-21 1988-11-28 Anelva Corp 電子銃装置
KR100646502B1 (ko) * 2004-12-13 2006-11-15 삼성에스디아이 주식회사 유기물 증착 장치
JP4767605B2 (ja) 2005-07-06 2011-09-07 住友重機械工業株式会社 ハース機構及び成膜装置

Also Published As

Publication number Publication date
JPS6169963A (ja) 1986-04-10

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term