JPS6359333U - - Google Patents
Info
- Publication number
- JPS6359333U JPS6359333U JP15269986U JP15269986U JPS6359333U JP S6359333 U JPS6359333 U JP S6359333U JP 15269986 U JP15269986 U JP 15269986U JP 15269986 U JP15269986 U JP 15269986U JP S6359333 U JPS6359333 U JP S6359333U
- Authority
- JP
- Japan
- Prior art keywords
- disk
- wafer
- installed inside
- vacuum chamber
- rotating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15269986U JPS6359333U (pt) | 1986-10-03 | 1986-10-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15269986U JPS6359333U (pt) | 1986-10-03 | 1986-10-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6359333U true JPS6359333U (pt) | 1988-04-20 |
Family
ID=31070912
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15269986U Pending JPS6359333U (pt) | 1986-10-03 | 1986-10-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6359333U (pt) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0374040A (ja) * | 1989-05-15 | 1991-03-28 | Nissin Electric Co Ltd | イオン注入装置 |
-
1986
- 1986-10-03 JP JP15269986U patent/JPS6359333U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0374040A (ja) * | 1989-05-15 | 1991-03-28 | Nissin Electric Co Ltd | イオン注入装置 |