JPS6359333U - - Google Patents
Info
- Publication number
- JPS6359333U JPS6359333U JP15269986U JP15269986U JPS6359333U JP S6359333 U JPS6359333 U JP S6359333U JP 15269986 U JP15269986 U JP 15269986U JP 15269986 U JP15269986 U JP 15269986U JP S6359333 U JPS6359333 U JP S6359333U
- Authority
- JP
- Japan
- Prior art keywords
- disk
- wafer
- installed inside
- vacuum chamber
- rotating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図はこの考案の一実施例を示す平断面図、
第２図は従来例の平断面図である。
１……真空チヤンバ、２……ウエハー、３……
デイスク、１１……サーボモータ、１２……包囲
体。
FIG. 1 is a plan sectional view showing an embodiment of this invention.
FIG. 2 is a plan sectional view of a conventional example. 1...Vacuum chamber, 2...Wafer, 3...
Disc, 11...servo motor, 12...enveloping body.
Claims (1)
ン注入されるウエハーが装着されるデイスクの回
転軸に、これを回転駆動ならびにピツチ送り駆動
するためのサーボモータの駆動軸を直結するとと
もに、前記サーボモータを前記真空チヤンバの内
部に、真空に対して気密にシールして設置してな
るウエハーデイスク駆動装置。 The drive shaft of a servo motor for rotating and pitch-feeding the disk is directly connected to the rotating shaft of the disk installed inside the vacuum chamber and on which the wafer to be ion-implanted is mounted. A wafer disk drive device, which is installed inside the vacuum chamber and sealed airtight against vacuum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15269986U JPS6359333U (en) | 1986-10-03 | 1986-10-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15269986U JPS6359333U (en) | 1986-10-03 | 1986-10-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6359333U true JPS6359333U (en) | 1988-04-20 |
Family
ID=31070912
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15269986U Pending JPS6359333U (en) | 1986-10-03 | 1986-10-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6359333U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0374040A (en) * | 1989-05-15 | 1991-03-28 | Nissin Electric Co Ltd | Ion implantation device |
-
1986
- 1986-10-03 JP JP15269986U patent/JPS6359333U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0374040A (en) * | 1989-05-15 | 1991-03-28 | Nissin Electric Co Ltd | Ion implantation device |