JPS6359331U - - Google Patents
Info
- Publication number
- JPS6359331U JPS6359331U JP13510386U JP13510386U JPS6359331U JP S6359331 U JPS6359331 U JP S6359331U JP 13510386 U JP13510386 U JP 13510386U JP 13510386 U JP13510386 U JP 13510386U JP S6359331 U JPS6359331 U JP S6359331U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- cassette
- processing apparatus
- plasma processing
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 6
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13510386U JPS6359331U (pt) | 1986-09-02 | 1986-09-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13510386U JPS6359331U (pt) | 1986-09-02 | 1986-09-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6359331U true JPS6359331U (pt) | 1988-04-20 |
Family
ID=31036973
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13510386U Pending JPS6359331U (pt) | 1986-09-02 | 1986-09-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6359331U (pt) |
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1986
- 1986-09-02 JP JP13510386U patent/JPS6359331U/ja active Pending