JPS6280336U - - Google Patents
Info
- Publication number
- JPS6280336U JPS6280336U JP17204085U JP17204085U JPS6280336U JP S6280336 U JPS6280336 U JP S6280336U JP 17204085 U JP17204085 U JP 17204085U JP 17204085 U JP17204085 U JP 17204085U JP S6280336 U JPS6280336 U JP S6280336U
- Authority
- JP
- Japan
- Prior art keywords
- wafer support
- wafer
- cassette
- pair
- support members
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 9
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17204085U JPS6280336U (pt) | 1985-11-07 | 1985-11-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17204085U JPS6280336U (pt) | 1985-11-07 | 1985-11-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6280336U true JPS6280336U (pt) | 1987-05-22 |
Family
ID=31108221
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17204085U Pending JPS6280336U (pt) | 1985-11-07 | 1985-11-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6280336U (pt) |
-
1985
- 1985-11-07 JP JP17204085U patent/JPS6280336U/ja active Pending
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