JPS6359328U - - Google Patents
Info
- Publication number
- JPS6359328U JPS6359328U JP15282086U JP15282086U JPS6359328U JP S6359328 U JPS6359328 U JP S6359328U JP 15282086 U JP15282086 U JP 15282086U JP 15282086 U JP15282086 U JP 15282086U JP S6359328 U JPS6359328 U JP S6359328U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- semiconductor wafer
- view
- center
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims description 16
- 239000004065 semiconductor Substances 0.000 claims description 10
- 238000001514 detection method Methods 0.000 claims description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15282086U JPS6359328U (enExample) | 1986-10-03 | 1986-10-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15282086U JPS6359328U (enExample) | 1986-10-03 | 1986-10-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6359328U true JPS6359328U (enExample) | 1988-04-20 |
Family
ID=31071146
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15282086U Pending JPS6359328U (enExample) | 1986-10-03 | 1986-10-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6359328U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0536812A (ja) * | 1991-07-26 | 1993-02-12 | Canon Inc | ウエハ搬送装置 |
-
1986
- 1986-10-03 JP JP15282086U patent/JPS6359328U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0536812A (ja) * | 1991-07-26 | 1993-02-12 | Canon Inc | ウエハ搬送装置 |