JPS61157546U - - Google Patents
Info
- Publication number
- JPS61157546U JPS61157546U JP3877985U JP3877985U JPS61157546U JP S61157546 U JPS61157546 U JP S61157546U JP 3877985 U JP3877985 U JP 3877985U JP 3877985 U JP3877985 U JP 3877985U JP S61157546 U JPS61157546 U JP S61157546U
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- wafer
- view
- belt
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 5
- 230000032258 transport Effects 0.000 claims 3
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
- Warehouses Or Storage Devices (AREA)
- Controlling Sheets Or Webs (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3877985U JPS61157546U (enExample) | 1985-03-20 | 1985-03-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3877985U JPS61157546U (enExample) | 1985-03-20 | 1985-03-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61157546U true JPS61157546U (enExample) | 1986-09-30 |
Family
ID=30546100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3877985U Pending JPS61157546U (enExample) | 1985-03-20 | 1985-03-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61157546U (enExample) |
-
1985
- 1985-03-20 JP JP3877985U patent/JPS61157546U/ja active Pending