JPS6359174U

JPS6359174U -

Info

Publication number: JPS6359174U
Application number: JP15210586U
Authority: JP
Priority date: 1986-10-04
Filing date: 1986-10-04
Publication date: 1988-04-20
Anticipated expiration: 2001-10-04
Also published as: JPH0641926Y2

Description

[Brief explanation of the drawing]

第１図は本考案の１実施例装置の構成を示す側
面図、第２図は同装置の要部を示す斜視図、第３
図ないし第６図は、それぞれ搬送ベルトの実施例
を示す斜視図、第７Ａ図は本考案の適用対象であ
る基板表面処理装置の概要を示す平面図、第７Ｂ
図は同じく立面図、第８図は従来の搬送装置を示
す側面図である。１……垂直軸、２……腕、３……保持手段、４
……ベース、５……クランプ爪、６……テーパー
スライダ、７……ハンダ槽、８……シユーターガ
イド、９……搬送ベルト、１０……クランプ、１
１……コンベアベルト、１２……シユーターガイ
ド、１３，１４……駆動ローラ、１５……搬送ベ
ルト、１６……透孔、１７……突起、１８〜２１
……フアン、２２……光電装置。 FIG. 1 is a side view showing the configuration of a device according to an embodiment of the present invention, FIG. 2 is a perspective view showing the main parts of the device, and FIG.
6 to 6 are perspective views showing embodiments of the conveyor belt, FIG. 7A is a plan view showing an outline of a substrate surface processing apparatus to which the present invention is applied, and FIG. 7B is a perspective view showing an embodiment of the conveyor belt.
The same figure is an elevational view, and FIG. 8 is a side view showing a conventional conveying device. 1... Vertical axis, 2... Arm, 3... Holding means, 4
... Base, 5 ... Clamp claw, 6 ... Taper slider, 7 ... Solder bath, 8 ... Shooter guide, 9 ... Conveyor belt, 10 ... Clamp, 1
1...Conveyor belt, 12...Shooter guide, 13, 14...Drive roller, 15...Transport belt, 16...Through hole, 17...Protrusion, 18-21
...Juan, 22...Photoelectric device.

Claims

[Scope of Claim for Utility Model Registration] (1) In a substrate transfer device that changes the posture of a substrate from a vertical position and transfers it horizontally, the device is installed below a substrate that is suspended and held in a vertical position. a concavely curved shooter guide that guides the transported substrate that is released from the vertical position and falls so that its surface is slightly inclined;
When the lower edge of the substrate to be transported comes into contact with it, it is driven to move in a direction that increases the inclination angle of the substrate,
A substrate conveyance device comprising an endless belt having a plurality of protrusions formed on the outer circumferential surface thereof to lock the lower edge of the substrate to be conveyed. (2) Practical use in which the endless belt is configured in the form of a breathable mesh or in the form of a flat belt with many through holes, and blower fans are placed on both sides above and below the area where the substrate to be transported is placed and transported. A substrate transport device according to claim (1) of patent registration.