JPS6358703U - - Google Patents
Info
- Publication number
- JPS6358703U JPS6358703U JP15290886U JP15290886U JPS6358703U JP S6358703 U JPS6358703 U JP S6358703U JP 15290886 U JP15290886 U JP 15290886U JP 15290886 U JP15290886 U JP 15290886U JP S6358703 U JPS6358703 U JP S6358703U
- Authority
- JP
- Japan
- Prior art keywords
- measured
- shape
- substrate
- projector
- measuring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims 7
- 230000004907 flux Effects 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 1
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15290886U JPS6358703U (enExample) | 1986-10-03 | 1986-10-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15290886U JPS6358703U (enExample) | 1986-10-03 | 1986-10-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6358703U true JPS6358703U (enExample) | 1988-04-19 |
Family
ID=31071315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15290886U Pending JPS6358703U (enExample) | 1986-10-03 | 1986-10-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6358703U (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS528609U (enExample) * | 1975-07-04 | 1977-01-21 | ||
| JPS5322759A (en) * | 1976-08-16 | 1978-03-02 | Oki Electric Ind Co Ltd | Thickness de tector of plate form objects |
-
1986
- 1986-10-03 JP JP15290886U patent/JPS6358703U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS528609U (enExample) * | 1975-07-04 | 1977-01-21 | ||
| JPS5322759A (en) * | 1976-08-16 | 1978-03-02 | Oki Electric Ind Co Ltd | Thickness de tector of plate form objects |
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