JPS6357931B2 - - Google Patents

Info

Publication number

JPS6357931B2

JPS6357931B2 JP20377882A JP20377882A JPS6357931B2 JP S6357931 B2 JPS6357931 B2 JP S6357931B2 JP 20377882 A JP20377882 A JP 20377882A JP 20377882 A JP20377882 A JP 20377882A JP S6357931 B2 JPS6357931 B2 JP S6357931B2

Authority

JP

Japan

Prior art keywords

temperature

atmosphere

nitrogen

oxygen

maintained

Prior art date

1982-11-22

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

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• 238000000034 method Methods 0.000 claims description 24
• 238000010304 firing Methods 0.000 claims description 13
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 11
• 239000001301 oxygen Substances 0.000 claims description 11
• 229910052760 oxygen Inorganic materials 0.000 claims description 11
• 238000001816 cooling Methods 0.000 claims description 10
• 239000003985 ceramic capacitor Substances 0.000 claims description 9
• 239000004065 semiconductor Substances 0.000 claims description 8
• 239000007789 gas Substances 0.000 claims description 7
• 238000010438 heat treatment Methods 0.000 claims description 4
• 238000004519 manufacturing process Methods 0.000 claims description 4
• 239000000843 powder Substances 0.000 claims description 4
• 239000002994 raw material Substances 0.000 claims description 4
• 239000001257 hydrogen Substances 0.000 claims description 3
• 229910052739 hydrogen Inorganic materials 0.000 claims description 3
• IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 3
• MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims 2
• 229910001882 dioxygen Inorganic materials 0.000 claims 2
• DOTMOQHOJINYBL-UHFFFAOYSA-N molecular nitrogen;molecular oxygen Chemical compound N#N.O=O DOTMOQHOJINYBL-UHFFFAOYSA-N 0.000 claims 2
• XKMRRTOUMJRJIA-UHFFFAOYSA-N ammonia nh3 Chemical compound N.N XKMRRTOUMJRJIA-UHFFFAOYSA-N 0.000 claims 1
• 229910001873 dinitrogen Inorganic materials 0.000 claims 1
• 229910052757 nitrogen Inorganic materials 0.000 claims 1
• 239000000463 material Substances 0.000 description 7
• 238000010405 reoxidation reaction Methods 0.000 description 6
• UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
• BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
• GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 3
• 230000000694 effects Effects 0.000 description 3
• 239000000203 mixture Substances 0.000 description 3
• 229910052573 porcelain Inorganic materials 0.000 description 3
• 238000011946 reduction process Methods 0.000 description 3
• 229910052709 silver Inorganic materials 0.000 description 3
• 239000004332 silver Substances 0.000 description 3
• 238000005245 sintering Methods 0.000 description 3
• AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 description 2
• 230000015556 catabolic process Effects 0.000 description 2
• 238000001035 drying Methods 0.000 description 2
• 238000005469 granulation Methods 0.000 description 2
• 230000003179 granulation Effects 0.000 description 2
• 238000002156 mixing Methods 0.000 description 2
• 238000000465 moulding Methods 0.000 description 2
• 238000010298 pulverizing process Methods 0.000 description 2
• 239000000126 substance Substances 0.000 description 2
• OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
• 229910021193 La 2 O 3 Inorganic materials 0.000 description 1
• 229910017493 Nd 2 O 3 Inorganic materials 0.000 description 1
• 229910010413 TiO 2 Inorganic materials 0.000 description 1
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
• 239000011230 binding agent Substances 0.000 description 1
• 238000001354 calcination Methods 0.000 description 1
• 239000003990 capacitor Substances 0.000 description 1
• 230000000052 comparative effect Effects 0.000 description 1
• 238000007796 conventional method Methods 0.000 description 1
• 230000001747 exhibiting effect Effects 0.000 description 1
• 238000002474 experimental method Methods 0.000 description 1
• 238000005259 measurement Methods 0.000 description 1
• 229910052761 rare earth metal Inorganic materials 0.000 description 1

Cited By (1)