JPS6357737U - - Google Patents
Info
- Publication number
- JPS6357737U JPS6357737U JP15225286U JP15225286U JPS6357737U JP S6357737 U JPS6357737 U JP S6357737U JP 15225286 U JP15225286 U JP 15225286U JP 15225286 U JP15225286 U JP 15225286U JP S6357737 U JPS6357737 U JP S6357737U
- Authority
- JP
- Japan
- Prior art keywords
- view
- susceptor
- recess
- wafer
- phase growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 7
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000012071 phase Substances 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15225286U JPS6357737U (xx) | 1986-10-02 | 1986-10-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15225286U JPS6357737U (xx) | 1986-10-02 | 1986-10-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6357737U true JPS6357737U (xx) | 1988-04-18 |
Family
ID=31070062
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15225286U Pending JPS6357737U (xx) | 1986-10-02 | 1986-10-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6357737U (xx) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5352370A (en) * | 1976-10-25 | 1978-05-12 | Hitachi Ltd | Wafer susceptor |
| JPS5353962A (en) * | 1976-10-27 | 1978-05-16 | Oki Electric Ind Co Ltd | Production of semicnductor wafers |
-
1986
- 1986-10-02 JP JP15225286U patent/JPS6357737U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5352370A (en) * | 1976-10-25 | 1978-05-12 | Hitachi Ltd | Wafer susceptor |
| JPS5353962A (en) * | 1976-10-27 | 1978-05-16 | Oki Electric Ind Co Ltd | Production of semicnductor wafers |