JPS62151732U - - Google Patents
Info
- Publication number
- JPS62151732U JPS62151732U JP3931086U JP3931086U JPS62151732U JP S62151732 U JPS62151732 U JP S62151732U JP 3931086 U JP3931086 U JP 3931086U JP 3931086 U JP3931086 U JP 3931086U JP S62151732 U JPS62151732 U JP S62151732U
- Authority
- JP
- Japan
- Prior art keywords
- liquid phase
- boat
- lid
- periphery
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007791 liquid phase Substances 0.000 claims description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3931086U JPS62151732U (xx) | 1986-03-18 | 1986-03-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3931086U JPS62151732U (xx) | 1986-03-18 | 1986-03-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62151732U true JPS62151732U (xx) | 1987-09-26 |
Family
ID=30852348
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3931086U Pending JPS62151732U (xx) | 1986-03-18 | 1986-03-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62151732U (xx) |
-
1986
- 1986-03-18 JP JP3931086U patent/JPS62151732U/ja active Pending