JPS6336030U - - Google Patents
Info
- Publication number
- JPS6336030U JPS6336030U JP12866786U JP12866786U JPS6336030U JP S6336030 U JPS6336030 U JP S6336030U JP 12866786 U JP12866786 U JP 12866786U JP 12866786 U JP12866786 U JP 12866786U JP S6336030 U JPS6336030 U JP S6336030U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- liquid phase
- phase epitaxial
- epitaxial growth
- growth apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007791 liquid phase Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 239000013078 crystal Substances 0.000 claims 1
- 239000000155 melt Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12866786U JPS6336030U (xx) | 1986-08-22 | 1986-08-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12866786U JPS6336030U (xx) | 1986-08-22 | 1986-08-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6336030U true JPS6336030U (xx) | 1988-03-08 |
Family
ID=31024540
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12866786U Pending JPS6336030U (xx) | 1986-08-22 | 1986-08-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6336030U (xx) |
-
1986
- 1986-08-22 JP JP12866786U patent/JPS6336030U/ja active Pending