JPS6357055U - - Google Patents
Info
- Publication number
- JPS6357055U JPS6357055U JP1986152650U JP15265086U JPS6357055U JP S6357055 U JPS6357055 U JP S6357055U JP 1986152650 U JP1986152650 U JP 1986152650U JP 15265086 U JP15265086 U JP 15265086U JP S6357055 U JPS6357055 U JP S6357055U
- Authority
- JP
- Japan
- Prior art keywords
- pressure plate
- correction ring
- lapping machine
- lap surface
- lapping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986152650U JPS6357055U (de) | 1986-10-03 | 1986-10-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986152650U JPS6357055U (de) | 1986-10-03 | 1986-10-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6357055U true JPS6357055U (de) | 1988-04-16 |
Family
ID=31070822
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986152650U Pending JPS6357055U (de) | 1986-10-03 | 1986-10-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6357055U (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001054856A (ja) * | 1999-07-09 | 2001-02-27 | Applied Materials Inc | 化学的機械研磨装置での使用のための溝付パターンを有する研磨パッド |
| KR100764988B1 (ko) * | 1997-05-15 | 2007-12-14 | 어플라이드 머티어리얼스, 인코포레이티드 | 화학기계적연마장치에사용하기위한홈패턴을가지는연마패드 및 연마방법 |
-
1986
- 1986-10-03 JP JP1986152650U patent/JPS6357055U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100764988B1 (ko) * | 1997-05-15 | 2007-12-14 | 어플라이드 머티어리얼스, 인코포레이티드 | 화학기계적연마장치에사용하기위한홈패턴을가지는연마패드 및 연마방법 |
| JP2001054856A (ja) * | 1999-07-09 | 2001-02-27 | Applied Materials Inc | 化学的機械研磨装置での使用のための溝付パターンを有する研磨パッド |