JPS6357049U - - Google Patents
Info
- Publication number
- JPS6357049U JPS6357049U JP15004286U JP15004286U JPS6357049U JP S6357049 U JPS6357049 U JP S6357049U JP 15004286 U JP15004286 U JP 15004286U JP 15004286 U JP15004286 U JP 15004286U JP S6357049 U JPS6357049 U JP S6357049U
- Authority
- JP
- Japan
- Prior art keywords
- rotary table
- wafer
- positioning device
- circumferential surface
- rotation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 9
- 230000000737 periodic effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000009751 slip forming Methods 0.000 claims 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Machine Tool Positioning Apparatuses (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15004286U JPS6357049U (cs) | 1986-09-30 | 1986-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15004286U JPS6357049U (cs) | 1986-09-30 | 1986-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6357049U true JPS6357049U (cs) | 1988-04-16 |
Family
ID=31065814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15004286U Pending JPS6357049U (cs) | 1986-09-30 | 1986-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6357049U (cs) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5036293U (cs) * | 1973-07-28 | 1975-04-16 | ||
| JPS60221246A (ja) * | 1984-04-17 | 1985-11-05 | Citizen Watch Co Ltd | 位置決め装置 |
-
1986
- 1986-09-30 JP JP15004286U patent/JPS6357049U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5036293U (cs) * | 1973-07-28 | 1975-04-16 | ||
| JPS60221246A (ja) * | 1984-04-17 | 1985-11-05 | Citizen Watch Co Ltd | 位置決め装置 |
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