JPS635627U - - Google Patents
Info
- Publication number
- JPS635627U JPS635627U JP10076486U JP10076486U JPS635627U JP S635627 U JPS635627 U JP S635627U JP 10076486 U JP10076486 U JP 10076486U JP 10076486 U JP10076486 U JP 10076486U JP S635627 U JPS635627 U JP S635627U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- gas
- gas blow
- box
- port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 6
- 239000000112 cooling gas Substances 0.000 claims description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10076486U JPS635627U (enExample) | 1986-06-28 | 1986-06-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10076486U JPS635627U (enExample) | 1986-06-28 | 1986-06-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS635627U true JPS635627U (enExample) | 1988-01-14 |
Family
ID=30970891
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10076486U Pending JPS635627U (enExample) | 1986-06-28 | 1986-06-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS635627U (enExample) |
-
1986
- 1986-06-28 JP JP10076486U patent/JPS635627U/ja active Pending