JPS6356260U - - Google Patents
Info
- Publication number
- JPS6356260U JPS6356260U JP14830086U JP14830086U JPS6356260U JP S6356260 U JPS6356260 U JP S6356260U JP 14830086 U JP14830086 U JP 14830086U JP 14830086 U JP14830086 U JP 14830086U JP S6356260 U JPS6356260 U JP S6356260U
- Authority
- JP
- Japan
- Prior art keywords
- rod
- magnetron sputtering
- magnetic field
- sputtering device
- shaped assembly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 3
- 230000005684 electric field Effects 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 239000000498 cooling water Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14830086U JPS6356260U (enExample) | 1986-09-26 | 1986-09-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14830086U JPS6356260U (enExample) | 1986-09-26 | 1986-09-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6356260U true JPS6356260U (enExample) | 1988-04-15 |
Family
ID=31062438
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14830086U Pending JPS6356260U (enExample) | 1986-09-26 | 1986-09-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6356260U (enExample) |
-
1986
- 1986-09-26 JP JP14830086U patent/JPS6356260U/ja active Pending