JPS63145857U - - Google Patents
Info
- Publication number
- JPS63145857U JPS63145857U JP3747787U JP3747787U JPS63145857U JP S63145857 U JPS63145857 U JP S63145857U JP 3747787 U JP3747787 U JP 3747787U JP 3747787 U JP3747787 U JP 3747787U JP S63145857 U JPS63145857 U JP S63145857U
- Authority
- JP
- Japan
- Prior art keywords
- target
- permanent magnet
- magnet group
- tubular
- tubular target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 5
- 239000004020 conductor Substances 0.000 claims 1
- 238000001755 magnetron sputter deposition Methods 0.000 claims 1
- 230000006837 decompression Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3747787U JPS63145857U (enExample) | 1987-03-14 | 1987-03-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3747787U JPS63145857U (enExample) | 1987-03-14 | 1987-03-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63145857U true JPS63145857U (enExample) | 1988-09-27 |
Family
ID=30848835
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3747787U Pending JPS63145857U (enExample) | 1987-03-14 | 1987-03-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63145857U (enExample) |
-
1987
- 1987-03-14 JP JP3747787U patent/JPS63145857U/ja active Pending