JPS6356259U - - Google Patents
Info
- Publication number
- JPS6356259U JPS6356259U JP14634886U JP14634886U JPS6356259U JP S6356259 U JPS6356259 U JP S6356259U JP 14634886 U JP14634886 U JP 14634886U JP 14634886 U JP14634886 U JP 14634886U JP S6356259 U JPS6356259 U JP S6356259U
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- rod
- bar
- forming
- magnetron sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 6
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 5
- 230000005684 electric field Effects 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 239000000498 cooling water Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14634886U JPS6356259U (OSRAM) | 1986-09-24 | 1986-09-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14634886U JPS6356259U (OSRAM) | 1986-09-24 | 1986-09-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6356259U true JPS6356259U (OSRAM) | 1988-04-15 |
Family
ID=31058729
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14634886U Pending JPS6356259U (OSRAM) | 1986-09-24 | 1986-09-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6356259U (OSRAM) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5746370U (OSRAM) * | 1980-08-29 | 1982-03-15 | ||
| JPS607705A (ja) * | 1983-06-28 | 1985-01-16 | 松下電器産業株式会社 | 複合機能素子の製造方法 |
-
1986
- 1986-09-24 JP JP14634886U patent/JPS6356259U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5746370U (OSRAM) * | 1980-08-29 | 1982-03-15 | ||
| JPS607705A (ja) * | 1983-06-28 | 1985-01-16 | 松下電器産業株式会社 | 複合機能素子の製造方法 |