JPS6355542U - - Google Patents
Info
- Publication number
- JPS6355542U JPS6355542U JP14941386U JP14941386U JPS6355542U JP S6355542 U JPS6355542 U JP S6355542U JP 14941386 U JP14941386 U JP 14941386U JP 14941386 U JP14941386 U JP 14941386U JP S6355542 U JPS6355542 U JP S6355542U
- Authority
- JP
- Japan
- Prior art keywords
- layer
- oxide film
- semiconductor device
- insulating film
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010410 layer Substances 0.000 claims description 7
- 239000011229 interlayer Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000007740 vapor deposition Methods 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 239000012808 vapor phase Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
Landscapes
- Local Oxidation Of Silicon (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14941386U JPS6355542U (enExample) | 1986-09-29 | 1986-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14941386U JPS6355542U (enExample) | 1986-09-29 | 1986-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6355542U true JPS6355542U (enExample) | 1988-04-14 |
Family
ID=31064597
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14941386U Pending JPS6355542U (enExample) | 1986-09-29 | 1986-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6355542U (enExample) |
-
1986
- 1986-09-29 JP JP14941386U patent/JPS6355542U/ja active Pending