JPS6355532U - - Google Patents

Info

Publication number

JPS6355532U

JPS6355532U JP14785286U JP14785286U JPS6355532U JP S6355532 U JPS6355532 U JP S6355532U JP 14785286 U JP14785286 U JP 14785286U JP 14785286 U JP14785286 U JP 14785286U JP S6355532 U JPS6355532 U JP S6355532U

Authority

JP

Japan

Prior art keywords

reaction tube

protrusions

sealing plate

supporting

inlet

Prior art date

1986-09-29

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
• Discuss

• 238000007789 sealing Methods 0.000 claims 3
• 238000009792 diffusion process Methods 0.000 claims 1
• 230000000903 blocking effect Effects 0.000 description 1
• 239000010453 quartz Substances 0.000 description 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1

Cited By (1)