JPS6355455A - Method for measuring residual chlorine - Google Patents
Method for measuring residual chlorineInfo
- Publication number
- JPS6355455A JPS6355455A JP61199363A JP19936386A JPS6355455A JP S6355455 A JPS6355455 A JP S6355455A JP 61199363 A JP61199363 A JP 61199363A JP 19936386 A JP19936386 A JP 19936386A JP S6355455 A JPS6355455 A JP S6355455A
- Authority
- JP
- Japan
- Prior art keywords
- measured
- liquid
- reagent
- chlorine
- free chlorine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000460 chlorine Substances 0.000 title claims abstract description 58
- 229910052801 chlorine Inorganic materials 0.000 title claims abstract description 58
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 title claims abstract description 57
- 238000000034 method Methods 0.000 title claims abstract description 23
- 239000003153 chemical reaction reagent Substances 0.000 claims abstract description 21
- 239000007788 liquid Substances 0.000 claims abstract description 21
- 239000000203 mixture Substances 0.000 claims abstract description 7
- CPELXLSAUQHCOX-UHFFFAOYSA-M Bromide Chemical compound [Br-] CPELXLSAUQHCOX-UHFFFAOYSA-M 0.000 claims abstract description 5
- 108060006613 prolamin Proteins 0.000 abstract description 16
- 238000005259 measurement Methods 0.000 abstract description 14
- 238000001514 detection method Methods 0.000 abstract description 8
- 230000000694 effects Effects 0.000 abstract description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 abstract description 8
- 229910052697 platinum Inorganic materials 0.000 abstract description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract 1
- 229910052709 silver Inorganic materials 0.000 abstract 1
- 239000004332 silver Substances 0.000 abstract 1
- IOLCXVTUBQKXJR-UHFFFAOYSA-M potassium bromide Chemical compound [K+].[Br-] IOLCXVTUBQKXJR-UHFFFAOYSA-M 0.000 description 14
- QDHHCQZDFGDHMP-UHFFFAOYSA-N Chloramine Chemical compound ClN QDHHCQZDFGDHMP-UHFFFAOYSA-N 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- ADZWSOLPGZMUMY-UHFFFAOYSA-M silver bromide Chemical compound [Ag]Br ADZWSOLPGZMUMY-UHFFFAOYSA-M 0.000 description 3
- 241000195493 Cryptophyta Species 0.000 description 2
- RWRDLPDLKQPQOW-UHFFFAOYSA-N Pyrrolidine Chemical compound C1CCNC1 RWRDLPDLKQPQOW-UHFFFAOYSA-N 0.000 description 2
- 239000011259 mixed solution Substances 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 230000001954 sterilising effect Effects 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 241000894006 Bacteria Species 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 230000031709 bromination Effects 0.000 description 1
- 238000005893 bromination reaction Methods 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 125000001246 bromo group Chemical group Br* 0.000 description 1
- KXZJHVJKXJLBKO-UHFFFAOYSA-N chembl1408157 Chemical compound N=1C2=CC=CC=C2C(C(=O)O)=CC=1C1=CC=C(O)C=C1 KXZJHVJKXJLBKO-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000005660 chlorination reaction Methods 0.000 description 1
- 125000001309 chloro group Chemical group Cl* 0.000 description 1
- -1 compound salts Chemical class 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000003206 sterilizing agent Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
Abstract
Description
【発明の詳細な説明】
〈産業上の利用分野〉
本発明は河川等の水の塩素処理におシフる残留」ｎ素の
測定方法に関し、更に詳しくは、遊１１１１塩素ど結合
塩素どが共存する水中の遊離塩素濃度を求める測定方法
に関する。[Detailed Description of the Invention] <Industrial Application Field> The present invention relates to a method for measuring residual ``n'' elements that occur during chlorination of water such as rivers. This invention relates to a measuring method for determining the free chlorine concentration in water.
〈従来の技術〉
通常、残留塩素として塩素Ｃｐ２のよ３ ＜＞ Ｍ ＃
１塩素と、クロラミンＮＨ２ＣＱのような＃＋合塩索と
が共存する。遊離塩素と結合塩素とは殺菌力に差があり
、殺菌に効果のある遊離塩素のみを検出することが要求
される。<Conventional technology> Usually, residual chlorine is chlorine Cp2 or 3 <> M #
1 chlorine and #+ compound salts such as chloramine NH2CQ coexist. There is a difference in sterilizing power between free chlorine and combined chlorine, and it is required to detect only free chlorine, which is effective for sterilizing.
従来、遊離塩素と結合塩素と、が共存する被測定液から
遊離塩素のみを検出する方法として、例えば特公昭４５
−２０２４０号に示される方法が公知である。Conventionally, as a method for detecting only free chlorine from a sample liquid in which free chlorine and combined chlorine coexist, for example,
The method shown in No.-20240 is publicly known.
この方法ではｐＨが５．６以上の臭化カリウム試薬が用
いられる。このような試薬の場合、クロラミンは殆ど臭
素置換されない為、Ｍ離塩素と結合塩素との分離が行な
える。This method uses a potassium bromide reagent with a pH of 5.6 or higher. In the case of such a reagent, since chloramine is hardly bromine-substituted, separation of M-free chlorine and bound chlorine can be performed.
即ち、ｐＨが例えば４．５の酸性サイドにあっては、結
合塩素は以下の式に従い試薬中のＫＢｒと反応し、
Ｎ Ｈ２ＣＱ ＋ Ｋ Ｂ ｒ −（１／ ２ ） Ｂ
ｒ ２・・・（１）
Ｂｒを遊離する。この為、遊離塩素が存在しない場合で
も電流が流れ、誤差となる。That is, when the pH is on the acidic side, for example 4.5, the combined chlorine reacts with KBr in the reagent according to the following formula, N H2CQ + KBr - (1/2) B
r2...(1) Release Br. For this reason, a current flows even when there is no free chlorine, resulting in an error.
一方、ｌ） Ｈを中性域（例えばＤＨ６，００）以上と
した場合、結合塩素の臭化置換は抑ＩＪ二され、主とし
て以下に示す遊１ＩＩＩｔｆＪＡ素との臭素置換が行わ
れる。On the other hand, when l) H is in the neutral range (for example, DH 6,00) or above, the bromination substitution of bound chlorine is suppressed, and bromine substitution with the free 1IIItfJA element shown below is mainly performed.
Ｃｎ２−＋−２ＫＢｒ−＋Ｂｒ２＋２ＫＣＱ・・・（２
）
従って、このとき遊離したＢｒ２を測定すれば遊ＩＩＩ
Ｉｌ塩素濃度のみの測定が行なえる。Cn2-+-2KBr-+Br2+2KCQ...(2
) Therefore, if Br2 released at this time is measured, free III
Only Il chlorine concentration can be measured.
しかしながら、この状態においてクロラミンと臭化カリ
ウムとは以下の式に従って反応しプロラミンＮＨ２Ｂｒ
を生成する。However, in this state, chloramine and potassium bromide react according to the following formula, prolamine NH2Br
generate.
Ｎ＋−１２ＣＱ 十ＫＢｒ−＋ＮＨ２Ｂｒ、−（３）こ
のプロラミンをポーラログラフイック手法で測定Ｊ゛る
と還元波が現れ、プロラミンが共存する状態ではプロラ
ミンによって流れる電流が加わり、遊離塩素ｌｌ皮に正
確に対応した出力を得ることが出来ない。N+-12CQ 10 KBr-+NH2Br,-(3) When this prolamin is measured using a polarographic method, a reduction wave appears, and when prolamin coexists, a current flowing due to prolamin is added, and it corresponds accurately to the free chlorine. I can't get the output that I want.
〈発明が解決しようと１”る問題点〉
本発明の解決しようとする技術的課題は、前記プロラミ
ンによる影響が現れず、遊離塩素濃度を正確に測定でき
るようにすることにある。<Problems to be Solved by the Invention> A technical problem to be solved by the present invention is to enable accurate measurement of free chlorine concentration without the influence of the prolamin.
・′問題点を解決するための手段〉
臭化物を含む試薬を用いポーラログラフ法により被測定
液中の遊離塩素濃度を測定する方法において、前記試薬
と被測定液との混合液のｌ）Ｈを６゜０から７．５の範
囲に保ち、印加電圧を＋０．６５ｖから＋０．４５Ｖ、
としたことにある。・'Means for solving the problem> In a method of measuring the free chlorine concentration in a liquid to be measured by a polarographic method using a reagent containing bromide, l) H of a mixture of the reagent and the liquid to be measured is 6 Keep the applied voltage within the range of °0 to 7.5, and apply the voltage from +0.65v to +0.45V.
The reason is that
く作用〉
臭化物を含む試薬を用い、この試薬と被測定液との混合
液のｐＨを６．０以上としてポーラログラフイク手法で
測定を行った場合、クロラミンによってＢｒ２は遊離し
ないが、クロラミンとＫＢｒとが反応しプロラミンが生
成される。このプロラミンによって還元波が現れるが、
印加電圧が＋０．６Ｖ付近であれば電流は少なく、遊ｆ
ｉｌｌ Ｊ！！素濃度検出への影響は少ない。本発明で
は印加電圧を＋０．６５Ｖから＋０．４５Ｖとし、７０
７ミンによる影響が少ない範囲において遊離塩素濃度の
測定を行うようにした。Effect> When measuring using a polarographic method using a reagent containing bromide and setting the pH of the mixture of this reagent and the liquid to be measured to 6.0 or higher, Br2 is not liberated by chloramine, but chloramine and KBr reacts to produce prolamin. A reduction wave appears due to this prolamin,
If the applied voltage is around +0.6V, the current is small and the free f
ill J! ! There is little effect on elementary concentration detection. In the present invention, the applied voltage is set from +0.65V to +0.45V, and 70
The free chlorine concentration was measured in a range that was less affected by 7min.
〈実施例〉 以下図面に従い本発明方法を詳細に説明する。<Example> The method of the present invention will be explained in detail below with reference to the drawings.
第１図は本発明方法を実施する為に使用された残留塩素
Ｎｔ ヲ示ｔ。図中、１はＣＨ３Ｃｏ０Ｈ１Ｃ１−１３
ＣＯＯＮａ 、ＫＢｒ及’ＣＦＮａＮ’ａよりなる試薬
、２は試薬ポンプ、３は被測定液、４はサンプルポンプ
、５は導入口５ａ及び排出口５ｂを持つ測定槽、６は指
示極としての回転白金電極、７は比較極としての臭化銀
電極、８は検出部である。FIG. 1 shows the residual chlorine Nt used to carry out the method of the present invention. In the figure, 1 is CH3Co0H1C1-13
Reagent consisting of COONa, KBr and 'CFNaN'a, 2 is a reagent pump, 3 is a liquid to be measured, 4 is a sample pump, 5 is a measurement tank having an inlet 5a and an outlet 5b, 6 is a rotating platinum electrode as an indicator electrode. The electrodes 7 are silver bromide electrodes as comparison electrodes, and 8 is a detection section.
試薬１と被測定液は一定の比率で混合され、測定ＷＪ５
に導入される。混合液は回転白金電極６と臭化銀電極７
間に印加された電圧によって還元を受番プ、電流が流れ
、検出部８によってポーラログラフイック手法により検
出が行われる。Reagent 1 and the liquid to be measured are mixed at a fixed ratio, and measurement WJ5
will be introduced in The mixed solution is a rotating platinum electrode 6 and a silver bromide electrode 7
The voltage applied between them causes reduction, current flows, and detection is performed by the detection unit 8 using a polarographic method.
第２図は結合塩素とＫＢｒとの反応生成物であるプロラ
ミンの影響を説明する為のポーラログラムで、実験では
遊離塩素が零で濃１６ ｐＥ）ｍの結合塩素を含む液が
使用された。曲線■はｐＨが５．４７の場合、曲線■は
ｐＨが６．００の場合である。液のｐ ｌ−１が６．０
付近の場合、結合塩素ににってＢｒ２は遊ＩＩＩＩＩ拷
ず、プロラミンのみ生成される。従って、第２図の検出
電流はプロラミンのみによるものと考えられる。図から
明らかなように、プロラミンによって還元波が観察され
るが、印加電圧が＋０．６Ｖ付近では小さくなっている
。Figure 2 is a polarogram to explain the influence of prolamin, which is a reaction product of bound chlorine and KBr. In the experiment, a solution containing zero free chlorine and bound chlorine at a concentration of 16 pE)m was used. Curve ■ is the case when the pH is 5.47, and curve ■ is the case when the pH is 6.00. Liquid p l-1 is 6.0
In the case of close proximity, only prolamin is produced without free Br2 due to combined chlorine. Therefore, it is considered that the detected current in FIG. 2 is caused only by prolamin. As is clear from the figure, reduction waves are observed due to prolamin, but they become smaller when the applied voltage is around +0.6V.
尚、この関係は、ｐＨが６．０から７．５の範囲におい
ても同様な傾向を示した。Note that this relationship showed a similar tendency in the pH range of 6.0 to 7.5.
第３図は更にプロラミンの影響をみるために、液のｐ
Ｈは６．０と一定にし、ｉ含塩素濃度゛を変更して行っ
て実験結果である。実験には遊離塩素が零で結合塩素濃
度が異なる液が使用された。曲線■の場合は結合塩素濃
度が０．９５ｐｐｍの場合、曲線■の場合は結合塩素濃
度が１．９２ｐｐｍの場合、曲線■の場合は結合塩素濃
度が２．８１ｐｐｍの場合、曲線■の場合は結合塩素濃
度が４．０１ｐｌ）ｍの場合、曲線■の場合は結合塩素
濃度が６．Ｏ８ｐｐｍの場合である。図から明らかなよ
うに、印加電圧が＋０．６Ｖ付近では還元波は小さな値
となっている。Figure 3 shows the pH of the liquid to further examine the influence of prolamin.
The experimental results were obtained by keeping H constant at 6.0 and changing the chlorine concentration i. The experiments used solutions with zero free chlorine and different concentrations of combined chlorine. For curve ■, when the combined chlorine concentration is 0.95 ppm, for curve ■, when the combined chlorine concentration is 1.92 ppm, for curve ■, when the combined chlorine concentration is 2.81 ppm, for curve ■ When the combined chlorine concentration is 4.01 pl)m, the combined chlorine concentration is 6.01 pl)m. This is the case of O8ppm. As is clear from the figure, the reduction wave has a small value when the applied voltage is around +0.6V.
この値は、例えば印加電圧を＋０．５Ｖ、結合塩素濃度
６．Ｏ８ｐｐｍとした場合、検出電流は０．５μＡ程度
であり、遊離塩素の測定において、約０．３ｐｐｍの誤
差にしかならず、更に印加電几を−１−０，６Ｖどした
場合、測定誤差は更に減少づる。This value is, for example, when the applied voltage is +0.5V and the combined chlorine concentration is 6. When O8ppm is used, the detection current is about 0.5μA, which results in an error of only about 0.3ppm in the measurement of free chlorine.If the applied voltage is changed to -1-0.6V, the measurement error is further reduced. Zuru.
一方、′１ｔ１１ＩＩｔ塩素のポーラログラムのプラト
ー領域と印加電圧との関係は第４図に示すような関係に
なっている。本実験にはｐ Ｉ−１が６．０で、遊離塩
素濃度が異なる被測定液が用いられた。On the other hand, the relationship between the plateau region of the polarogram of '1t11IIt chlorine and the applied voltage is as shown in FIG. In this experiment, test liquids with p I-1 of 6.0 and different free chlorine concentrations were used.
そこで本発明では前記プラトー領域と印加電圧との関係
を考慮し、プロラミンによる影響が小さな印加電圧範囲
として＋０．４５Ｖ〜−）０．６５Ｖを選定した。Therefore, in the present invention, in consideration of the relationship between the plateau region and the applied voltage, +0.45 V to -0.65 V is selected as the applied voltage range in which the influence of prolamin is small.
〈発明の効果〉
本発明によれば、臭化物を含む試薬を用い、この試薬と
被測定液との混合液のｐＨを６．０以上とし−Ｃポーラ
ログラフィク手法で遊離塩素の測定を行う方法において
、測定の過程で結合塩素とＫ １３ ｒとが反応して生
成されるプロラミンによる影響が現れず、遊離塩素濃度
を正確に測定することが出来る。<Effects of the Invention> According to the present invention, a method for measuring free chlorine by using a bromide-containing reagent and setting the pH of a mixed solution of this reagent and a liquid to be measured at 6.0 or higher using a -C polarographic method. In this method, the free chlorine concentration can be accurately measured without being affected by prolamin produced by the reaction between bound chlorine and K 13 r during the measurement process.
第５図は本発明の効果を示す説明図で、遊離塩素と結合
塩素とが共存した状態での測定結果であ手分析で検出し
た被測定液中の結合塩素濃度を表わす。遊離塩素がｌｐ
ｐｍ以下で、結合塩素が５ｐｐｍ、８１）ｐｍ、 １ｏ
ｐｐｍｔ＆度存在Ｌ／１”も、残留塩素計出力への影響
は少なく、遊離塩素濃度の変化（横軸 遊離塩素は手分
析で検出）に対し出力は直線的に変化していることがわ
かる。FIG. 5 is an explanatory diagram showing the effects of the present invention, and shows the combined chlorine concentration in the liquid to be measured detected by manual analysis as a measurement result in a state where free chlorine and combined chlorine coexist. Free chlorine is lp
pm or less, combined chlorine is 5 ppm, 81) pm, 1o
It can be seen that ppmt & degree presence L/1'' also has little effect on the residual chlorine meter output, and the output changes linearly with changes in free chlorine concentration (horizontal axis: free chlorine is detected by manual analysis).
尚、本発明では試料と被測定液との混合液のｐＨが中性
域の為、夏場の温度の高い季節では雑菌が繁殖し、測定
槽５内に藻が発生することがあるが、この対策として、
例えば測定に影響を与えないシアン化ナトリウムＮａ
Ｎ３を滅菌剤として使用し試薬に添加すれば、藻の発生
を効果的に防ぐことが出来る。In addition, in the present invention, since the pH of the mixture of the sample and the liquid to be measured is in the neutral range, bacteria may breed and algae may grow in the measurement tank 5 during the summer season when the temperature is high. As a countermeasure,
For example, sodium cyanide, which does not affect the measurement.
Using N3 as a sterilizing agent and adding it to reagents can effectively prevent the growth of algae.
第１図は本発明方法を実ｔＭする為に使用された残留塩
素計の構成図、第２図及び第３図はプロラミンのポーラ
ログラム、第４図は遊離塩素のポーラログラム、第５図
は本発明の効果を示す説明図である。
１・・・試薬、３・・・被測定液、５・・・測定槽、６
・・・指示極としての回転白金電極、７・・・対極とし
ての臭化銀電極、８・・・検出部
篤１図
１：試薬、 ３被測定液、 ５測定相。Figure 1 is a block diagram of a residual chlorine meter used to carry out the method of the present invention, Figures 2 and 3 are polarograms of prolamin, Figure 4 is polarograms of free chlorine, and Figure 5 is a polarogram of free chlorine. FIG. 3 is an explanatory diagram showing the effects of the present invention. 1...Reagent, 3...Measurement liquid, 5...Measurement tank, 6
...Rotating platinum electrode as an indicator electrode, 7. Silver bromide electrode as a counter electrode, 8. Detection section 1 Figure 1: Reagent, 3. Measurement liquid, 5. Measurement phase.
Claims (1)
液中の遊離塩素濃度を測定する方法において、前記試薬
と前記被測定液との混合液のｐＨを６．０から７．５の
範囲に保ち、印加電圧を＋０．６５Ｖから＋０．４５Ｖ
とし、前記遊離塩素濃度を測定するようにしたことを特
徴とする残留塩素測定方法。In a method for measuring the free chlorine concentration in a liquid to be measured by a polarographic method using a reagent containing bromide, the pH of the mixture of the reagent and the liquid to be measured is maintained in the range of 6.0 to 7.5, and the voltage is applied. Increase the voltage from +0.65V to +0.45V
A method for measuring residual chlorine, characterized in that the free chlorine concentration is measured.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61199363A JPH0610663B2 (en) | 1986-08-26 | 1986-08-26 | Residual chlorine measurement method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61199363A JPH0610663B2 (en) | 1986-08-26 | 1986-08-26 | Residual chlorine measurement method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6355455A true JPS6355455A (en) | 1988-03-09 |
| JPH0610663B2 JPH0610663B2 (en) | 1994-02-09 |
Family
ID=16406513
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61199363A Expired - Lifetime JPH0610663B2 (en) | 1986-08-26 | 1986-08-26 | Residual chlorine measurement method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0610663B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000074877A (en) * | 1998-08-26 | 2000-03-14 | Noritz Corp | Device for measuring residual chlorine concentration |
| US7180584B2 (en) | 1994-10-07 | 2007-02-20 | Renesas Technology Corp. | Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns of an object to be inspected |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59222753A (en) * | 1983-06-01 | 1984-12-14 | Nissin Electric Co Ltd | Measuring apparatus using microorganism electrode |
| JPS6156957A (en) * | 1984-08-28 | 1986-03-22 | Yokogawa Hokushin Electric Corp | Residual chlorine meter |
-
1986
- 1986-08-26 JP JP61199363A patent/JPH0610663B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59222753A (en) * | 1983-06-01 | 1984-12-14 | Nissin Electric Co Ltd | Measuring apparatus using microorganism electrode |
| JPS6156957A (en) * | 1984-08-28 | 1986-03-22 | Yokogawa Hokushin Electric Corp | Residual chlorine meter |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7180584B2 (en) | 1994-10-07 | 2007-02-20 | Renesas Technology Corp. | Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns of an object to be inspected |
| US7460220B2 (en) | 1994-10-07 | 2008-12-02 | Renesas Technology Corporation | Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns of an object to be inspected |
| JP2000074877A (en) * | 1998-08-26 | 2000-03-14 | Noritz Corp | Device for measuring residual chlorine concentration |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0610663B2 (en) | 1994-02-09 |
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