JPS6355431U - - Google Patents
Info
- Publication number
- JPS6355431U JPS6355431U JP14798186U JP14798186U JPS6355431U JP S6355431 U JPS6355431 U JP S6355431U JP 14798186 U JP14798186 U JP 14798186U JP 14798186 U JP14798186 U JP 14798186U JP S6355431 U JPS6355431 U JP S6355431U
- Authority
- JP
- Japan
- Prior art keywords
- etching
- openings
- etching apparatus
- etching solution
- jig container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 9
- 235000012431 wafers Nutrition 0.000 claims 2
Landscapes
- ing And Chemical Polishing (AREA)
Description
第１図はこの考案の一実施例を示すエツチング
装置の断面図、第２図は従来のエツチング装置を
示す断面図である。
図において、１はエツチング槽、２はエツチン
グ液、３はホルダ、４はウエハ、５，９は取手、
６は治具容器、７は開口部、８は蓋である。なお
、各図中の同一符号は同一または相当部分を示す
。
FIG. 1 is a sectional view of an etching apparatus showing an embodiment of this invention, and FIG. 2 is a sectional view of a conventional etching apparatus. In the figure, 1 is an etching tank, 2 is an etching solution, 3 is a holder, 4 is a wafer, 5 and 9 are handles,
6 is a jig container, 7 is an opening, and 8 is a lid. Note that the same reference numerals in each figure indicate the same or corresponding parts.
Claims (1)
グ槽内のエツチング液中に浸漬し、前記各ウエハ
のエツチングを行うエツチング装置において、前
記ホルダを収納した状態で前記エツチング液中に
浸漬される治具容器を具備せしめ、この治具容器
の底面または側面に所要数の開口部を形成すると
ともに、これらの開口部に開閉自在の蓋を設けた
ことを特徴とするエツチング装置。 In an etching apparatus that immerses a holder containing a large number of wafers in an etching solution in an etching tank and etches each wafer, a jig container is immersed in the etching solution with the holder accommodated therein. What is claimed is: 1. An etching apparatus characterized in that a required number of openings are formed on the bottom or side surface of the jig container, and a lid that can be opened and closed is provided on these openings.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14798186U JPS6355431U (en) | 1986-09-25 | 1986-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14798186U JPS6355431U (en) | 1986-09-25 | 1986-09-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6355431U true JPS6355431U (en) | 1988-04-13 |
Family
ID=31061835
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14798186U Pending JPS6355431U (en) | 1986-09-25 | 1986-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6355431U (en) |
-
1986
- 1986-09-25 JP JP14798186U patent/JPS6355431U/ja active Pending
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