JPS6355431U - - Google Patents
Info
- Publication number
- JPS6355431U JPS6355431U JP14798186U JP14798186U JPS6355431U JP S6355431 U JPS6355431 U JP S6355431U JP 14798186 U JP14798186 U JP 14798186U JP 14798186 U JP14798186 U JP 14798186U JP S6355431 U JPS6355431 U JP S6355431U
- Authority
- JP
- Japan
- Prior art keywords
- etching
- openings
- etching apparatus
- etching solution
- jig container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 9
- 235000012431 wafers Nutrition 0.000 claims 2
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14798186U JPS6355431U (de) | 1986-09-25 | 1986-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14798186U JPS6355431U (de) | 1986-09-25 | 1986-09-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6355431U true JPS6355431U (de) | 1988-04-13 |
Family
ID=31061835
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14798186U Pending JPS6355431U (de) | 1986-09-25 | 1986-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6355431U (de) |
-
1986
- 1986-09-25 JP JP14798186U patent/JPS6355431U/ja active Pending
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