JPS6355428U - - Google Patents

Info

Publication number
JPS6355428U
JPS6355428U JP14808286U JP14808286U JPS6355428U JP S6355428 U JPS6355428 U JP S6355428U JP 14808286 U JP14808286 U JP 14808286U JP 14808286 U JP14808286 U JP 14808286U JP S6355428 U JPS6355428 U JP S6355428U
Authority
JP
Japan
Prior art keywords
ultraviolet light
semiconductor manufacturing
irradiation surface
mercury
lamp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14808286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14808286U priority Critical patent/JPS6355428U/ja
Priority to US07/097,188 priority patent/US4768464A/en
Priority to US07/154,290 priority patent/US4803095A/en
Publication of JPS6355428U publication Critical patent/JPS6355428U/ja
Priority to US07/190,355 priority patent/US4974542A/en
Pending legal-status Critical Current

Links

JP14808286U 1986-09-26 1986-09-26 Pending JPS6355428U (ru)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP14808286U JPS6355428U (ru) 1986-09-26 1986-09-26
US07/097,188 US4768464A (en) 1986-09-26 1987-09-16 Chemical vapor reaction apparatus
US07/154,290 US4803095A (en) 1986-09-26 1988-02-10 Chemical vapor reaction process by virtue of uniform irradiation
US07/190,355 US4974542A (en) 1986-09-26 1988-05-05 Photochemical vapor reaction apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14808286U JPS6355428U (ru) 1986-09-26 1986-09-26

Publications (1)

Publication Number Publication Date
JPS6355428U true JPS6355428U (ru) 1988-04-13

Family

ID=31062029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14808286U Pending JPS6355428U (ru) 1986-09-26 1986-09-26

Country Status (1)

Country Link
JP (1) JPS6355428U (ru)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015520010A (ja) * 2012-03-26 2015-07-16 ヘレーウス ノーブルライト ゲゼルシャフト ミット ベシュレンクテルハフツングＨｅｒａｅｕｓ Ｎｏｂｌｅｌｉｇｈｔ ＧｍｂＨ 基板照射装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6053016A (ja) * 1983-09-02 1985-03-26 Toshiba Corp 試料処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6053016A (ja) * 1983-09-02 1985-03-26 Toshiba Corp 試料処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015520010A (ja) * 2012-03-26 2015-07-16 ヘレーウス ノーブルライト ゲゼルシャフト ミット ベシュレンクテルハフツングＨｅｒａｅｕｓ Ｎｏｂｌｅｌｉｇｈｔ ＧｍｂＨ 基板照射装置

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