JPS6355109A - Production of aluminum nitride powder - Google Patents
Production of aluminum nitride powderInfo
- Publication number
- JPS6355109A JPS6355109A JP19974286A JP19974286A JPS6355109A JP S6355109 A JPS6355109 A JP S6355109A JP 19974286 A JP19974286 A JP 19974286A JP 19974286 A JP19974286 A JP 19974286A JP S6355109 A JPS6355109 A JP S6355109A
- Authority
- JP
- Japan
- Prior art keywords
- aluminum nitride
- containing compound
- powder
- aqueous solution
- aluminum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000843 powder Substances 0.000 title claims abstract description 40
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 title claims abstract description 37
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 239000007864 aqueous solution Substances 0.000 claims abstract description 23
- 150000001875 compounds Chemical class 0.000 claims abstract description 20
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 15
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 15
- -1 nitrogen - containing compound Chemical class 0.000 claims abstract description 12
- 239000002243 precursor Substances 0.000 claims abstract description 11
- 239000012298 atmosphere Substances 0.000 claims abstract description 10
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000011812 mixed powder Substances 0.000 claims description 11
- 230000001590 oxidative effect Effects 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 4
- DHMQDGOQFOQNFH-UHFFFAOYSA-N Glycine Chemical compound NCC(O)=O DHMQDGOQFOQNFH-UHFFFAOYSA-N 0.000 abstract description 10
- 239000004471 Glycine Substances 0.000 abstract description 5
- 229920000609 methyl cellulose Polymers 0.000 abstract description 5
- 239000001923 methylcellulose Substances 0.000 abstract description 5
- 235000010981 methylcellulose Nutrition 0.000 abstract description 5
- DIZPMCHEQGEION-UHFFFAOYSA-H aluminium sulfate (anhydrous) Chemical compound [Al+3].[Al+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O DIZPMCHEQGEION-UHFFFAOYSA-H 0.000 abstract description 3
- BNGXYYYYKUGPPF-UHFFFAOYSA-M (3-methylphenyl)methyl-triphenylphosphanium;chloride Chemical compound [Cl-].CC1=CC=CC(C[P+](C=2C=CC=CC=2)(C=2C=CC=CC=2)C=2C=CC=CC=2)=C1 BNGXYYYYKUGPPF-UHFFFAOYSA-M 0.000 abstract description 2
- 229920003171 Poly (ethylene oxide) Polymers 0.000 abstract description 2
- 239000000243 solution Substances 0.000 abstract description 2
- 238000001354 calcination Methods 0.000 abstract 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- 238000005245 sintering Methods 0.000 description 6
- 239000012299 nitrogen atmosphere Substances 0.000 description 5
- XNDZQQSKSQTQQD-UHFFFAOYSA-N 3-methylcyclohex-2-en-1-ol Chemical compound CC1=CC(O)CCC1 XNDZQQSKSQTQQD-UHFFFAOYSA-N 0.000 description 4
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 239000004372 Polyvinyl alcohol Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000005121 nitriding Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 229920002451 polyvinyl alcohol Polymers 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- ZCCIPPOKBCJFDN-UHFFFAOYSA-N calcium nitrate Chemical compound [Ca+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O ZCCIPPOKBCJFDN-UHFFFAOYSA-N 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000007127 saponification reaction Methods 0.000 description 2
- OBOSXEWFRARQPU-UHFFFAOYSA-N 2-n,2-n-dimethylpyridine-2,5-diamine Chemical compound CN(C)C1=CC=C(N)C=N1 OBOSXEWFRARQPU-UHFFFAOYSA-N 0.000 description 1
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 1
- 229910000287 alkaline earth metal oxide Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- 229910002090 carbon oxide Inorganic materials 0.000 description 1
- XEVRDFDBXJMZFG-UHFFFAOYSA-N carbonyl dihydrazine Chemical compound NNC(=O)NN XEVRDFDBXJMZFG-UHFFFAOYSA-N 0.000 description 1
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229920005610 lignin Polymers 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
- 229910001404 rare earth metal oxide Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002195 soluble material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Abstract
Description
【発明の詳細な説明】
〔技術分野〕
この発明は、高熱伝導性基板を製造するのに適した窒化
アルミニウム粉末の製法に関する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to a method for producing aluminum nitride powder suitable for producing highly thermally conductive substrates.
ＩＣ等に代表される半導体素子の高集積化や大電力化が
進み、これに伴って、放熱性の良い電気絶縁材料が要求
されるようになった。これに応えて各種の高熱伝導性基
板が提案されている。その中でも特に窒化アルミニウム
セラミック基板が、熱伝導性、熱膨張性、電気絶縁性等
の点にすぐれていると言うことから、実用化が進んでい
る。BACKGROUND OF THE INVENTION As semiconductor devices such as ICs have become more highly integrated and have more power, electrical insulating materials with good heat dissipation properties have become required. In response to this demand, various highly thermally conductive substrates have been proposed. Among these, aluminum nitride ceramic substrates are being put into practical use because they are said to have excellent thermal conductivity, thermal expansion properties, electrical insulation properties, and the like.
ところが、この窒化アルミニウムセラミック基板は、価
格が高いという欠点がある。この高価格の原因としては
、特に、原料となる窒化アルミニウム粉末が高価格であ
ること、焼結に高温を有することなどが挙げられる。However, this aluminum nitride ceramic substrate has the drawback of being expensive. The reasons for this high price include, in particular, the high cost of aluminum nitride powder as a raw material and the high temperature required for sintering.
従来から窒化アルミニウム粉末は、アルミニウムの直接
窒化やアルミナの炭素還元等にによって製造されている
が、たとえば、アルミニウムの直接窒化法においては、
高純度で粒径の小さい窒化アルミニウム粉末を得ること
が困難であり、アルミナの炭素還元法においては、反応
に高温を要する、原料価格が高い等の問題があった。ア
ルミナの炭素還元法の改良として、アルミニウム源を溶
液状態で混合する方法などが提案されているが、けん濁
状態での混合であり、分子オーダーでの混合がなされな
いため、反応に高温を要する等により、製造価格が高い
などの問題が残っている。Conventionally, aluminum nitride powder has been produced by direct nitriding of aluminum or carbon reduction of alumina. For example, in the direct nitriding method of aluminum,
It is difficult to obtain aluminum nitride powder with high purity and small particle size, and the carbon reduction method of alumina has problems such as requiring high temperature for reaction and high raw material costs. As an improvement to the carbon reduction method for alumina, a method has been proposed in which the aluminum source is mixed in a solution state, but since the mixing is in a suspended state and the mixing is not done on a molecular level, the reaction requires high temperatures. However, there remain problems such as high manufacturing costs.
この発明は、このような事情に鑑みて、裔純度で微粒子
の易焼結性を有する窒化アルミニウム粉末を安価で得る
ことができる窒化アルミニウム粉末の製法を提供するこ
とを目的としている。In view of the above circumstances, an object of the present invention is to provide a method for producing aluminum nitride powder that can inexpensively obtain aluminum nitride powder that has fine particle purity and is easy to sinter.
この発明は、このような目的を達成するために、アルミ
ニウム酸化物前駆体、炭素含有化合物、および、窒素含
有化合物を水溶液として混合し、前記化合物の混合粉末
を得、この混合粉末を非酸化性雰囲気で焼成して窒化ア
ルミニウム粉末を得るようにする窒化アルミニウム粉末
の製法を要旨としている。In order to achieve such an object, the present invention mixes an aluminum oxide precursor, a carbon-containing compound, and a nitrogen-containing compound as an aqueous solution, obtains a mixed powder of the compounds, and converts this mixed powder into a non-oxidizing powder. The gist of this paper is a method for producing aluminum nitride powder by firing in an atmosphere to obtain aluminum nitride powder.
以下に、この発明を工程にしたがって順に詳しく説明す
る。The present invention will be explained in detail below, step by step.
■ アルミニウム酸化物前駆体、炭素含有化合物、およ
び、窒素含有化合物を水溶液として混合する。この水溶
液では、分子オーダーで各成分が均質に混合されている
。(2) Mixing an aluminum oxide precursor, a carbon-containing compound, and a nitrogen-containing compound as an aqueous solution. In this aqueous solution, each component is homogeneously mixed on a molecular order.
アルミニウム酸化物前駆体としては、硝酸アルミニウム
、硫酸アルミニウムなど水溶性のものが挙げられる。Examples of the aluminum oxide precursor include water-soluble ones such as aluminum nitrate and aluminum sulfate.
炭素含有化合物としては、メチルセルロース。Methylcellulose is a carbon-containing compound.
ポリエチレンオキサイド、ポリビニルアルコール、リグ
ニンなどの水溶性のものが挙げられる。Examples include water-soluble materials such as polyethylene oxide, polyvinyl alcohol, and lignin.
窒素含有化合物としては、グリシン、カルボニルヒドラ
ジド、エチレンジアミンなどの水溶性のものが挙げられ
る。Examples of the nitrogen-containing compound include water-soluble compounds such as glycine, carbonyl hydrazide, and ethylenediamine.
■ 前記混合水溶液から、蒸発乾燥などにより、アルミ
ニウム酸化物前駆体、炭素含有化合物、および、窒素含
有化合物が分子オーダーで均質に混合された混合微細粉
末を得る。(2) A mixed fine powder in which an aluminum oxide precursor, a carbon-containing compound, and a nitrogen-containing compound are homogeneously mixed on a molecular order is obtained from the mixed aqueous solution by evaporation drying or the like.
乾燥温度としては、１００〜２００℃が適当である。A suitable drying temperature is 100 to 200°C.
■ この混合物粉末を非酸化性雰囲気で焼成して窒化ア
ルミニウム粉末を得る。混合物粉末は、混合物中に窒素
源を有しているため、局所的に還元雰囲気が形成され混
合物内部から窒化反応が促進され、窒化アルミニウムが
迅速に形成される。(2) This mixed powder is fired in a non-oxidizing atmosphere to obtain aluminum nitride powder. Since the mixture powder has a nitrogen source in the mixture, a reducing atmosphere is locally formed, nitriding reaction is promoted from inside the mixture, and aluminum nitride is rapidly formed.
非酸化性雰囲気としては、アルゴン、窒素、−酸化炭素
さらに好ましくは、アンモニアなどが用いられる。As the non-oxidizing atmosphere, argon, nitrogen, carbon oxide, and more preferably ammonia are used.
焼成温度は、９００°Ｃ以上、好ましくは、１２００〜
１８００”Ｃである。なお、残留炭素は、窒化アルミニ
ウム形成後、６００〜７００℃の酸化性雰囲気中で加熱
処理するようにすれば除去できる。The firing temperature is 900°C or higher, preferably 1200°C or higher.
1800"C. Note that residual carbon can be removed by heat treatment in an oxidizing atmosphere at 600 to 700C after aluminum nitride is formed.
この発明の製法によれば、アルミニウム酸化物前駆体、
炭素含有化合物、および、窒素含有化合物が分子オーダ
ーで均質に混合された微細粉末を、非酸化性雰囲気で焼
成するので、微細で均質な窒化アルミニウム粉末を迅速
に且つ安価に得ることができる。しかも、微細粉末ゆえ
に、焼結性がよい。According to the production method of this invention, an aluminum oxide precursor,
Since the fine powder in which the carbon-containing compound and the nitrogen-containing compound are homogeneously mixed on a molecular order is fired in a non-oxidizing atmosphere, fine and homogeneous aluminum nitride powder can be obtained quickly and at low cost. Moreover, since it is a fine powder, it has good sinterability.
つぎに、実施例を詳しく説明する。Next, examples will be explained in detail.
（実施例１）
硝酸アルミニウム・９水和物が１重量部に対し、メチル
セルロース（信越化学工業■製ＳＭタイプ）が０．１７
重量部、グリシンが０．２９重量部となるように混合し
た水溶液を作った。この水溶液を蒸発させ１５０℃で乾
燥して混合粉末を得たのち、１５００℃の窒素雰囲気中
で１０時間焼成して窒化アルミニウム粉末を得た。(Example 1) Methyl cellulose (SM type manufactured by Shin-Etsu Chemical Co., Ltd.) was 0.17 parts by weight of aluminum nitrate nonahydrate.
An aqueous solution was prepared by mixing 0.29 parts by weight of glycine and 0.29 parts by weight. This aqueous solution was evaporated and dried at 150°C to obtain a mixed powder, which was then calcined in a nitrogen atmosphere at 1500°C for 10 hours to obtain aluminum nitride powder.
なお、この窒化アルミニウム粉末は、純度が９８％以上
、平均粒径が約２μｍであった。Note that this aluminum nitride powder had a purity of 98% or more and an average particle size of about 2 μm.
（実施例２）
硝酸アルミニウム・９水和物が１重量部に対し、メチル
セルロース（信越化学工業■製ＳＭタイプ）が０．１３
重量部、グリシンが０．８７重量部となるように混合し
た水溶液を作った。この水溶液を蒸発させ１５０°Ｃで
乾燥して混合粉末を得たのち、１４００℃のアンモニア
雰囲気中で５時間焼成して窒化アルミニウム粉末を得た
。(Example 2) Methyl cellulose (SM type manufactured by Shin-Etsu Chemical Co., Ltd.) was 0.13 parts by weight of aluminum nitrate nonahydrate.
An aqueous solution was prepared by mixing glycine in an amount of 0.87 parts by weight. This aqueous solution was evaporated and dried at 150°C to obtain a mixed powder, which was then calcined in an ammonia atmosphere at 1400°C for 5 hours to obtain aluminum nitride powder.
なお、この窒化アルミニウム粉末は、純度が９８％以上
、平均粒径が約２μｍであった。Note that this aluminum nitride powder had a purity of 98% or more and an average particle size of about 2 μm.
（実施例３）
硫酸アルミニウムが１重量部に対し、メチルセルロース
（信越化学工業ａ２）製ＳＭタイプ）が０．２５重足部
、グリシンが０．４４重量部となるように混合した水溶
液を作った。この水溶液を蒸発させ１５０℃で乾燥して
混合粉末を得たのち、１６０Ｑ ”ｃの窒素雰囲気中で
３時間焼成して窒化アルミニウム粉末を得た。(Example 3) An aqueous solution was prepared by mixing 1 part by weight of aluminum sulfate, 0.25 parts by weight of methyl cellulose (SM type manufactured by Shin-Etsu Chemical A2), and 0.44 parts by weight of glycine. . This aqueous solution was evaporated and dried at 150°C to obtain a mixed powder, which was then calcined for 3 hours in a nitrogen atmosphere of 160Q''c to obtain aluminum nitride powder.
なお、この窒化アルミニウム粉末は、純度が９８％以上
、平均粒径が３μｍ以下であった。Note that this aluminum nitride powder had a purity of 98% or more and an average particle size of 3 μm or less.
（実施例４）
硝酸アルミニウム・９水和物が１重量部に対し、ケン化
度９０％のポリビニルアルコールが０．１２重世部、カ
ルボッヒドラジドが０．１８重量部となるように混合し
た水溶液を作った。この水溶液を蒸発させ１５０℃で乾
燥して混合粉末を得たのち、１５００℃の窒素雰囲気中
で３時間焼成して窒化アルミニウム粉末を得た。(Example 4) 1 part by weight of aluminum nitrate nonahydrate was mixed with 0.12 parts by weight of polyvinyl alcohol with a degree of saponification of 90% and 0.18 parts by weight of carbohydrazide. I made an aqueous solution. This aqueous solution was evaporated and dried at 150°C to obtain a mixed powder, which was then calcined for 3 hours in a nitrogen atmosphere at 1500°C to obtain aluminum nitride powder.
なお、この窒化アルミニウム粉末は、純度が９８％以上
、平均粒径が約２μｍであった。Note that this aluminum nitride powder had a purity of 98% or more and an average particle size of about 2 μm.
（実施例５）
硝酸アルミニウム・９水和物が１重量部に対し、ケン化
度９０％のポリビニルアルコールが０．２重量部、エチ
レンジアミンが０．５３重量部となるように混合した水
溶液を作った。この水溶液を蒸発させ１５０℃で乾燥し
て混合粉末を得たのち、１４５０ ”Ｃの窒素雰囲気中
で１０時間焼成して窒化アルミニウム粉末を得た。(Example 5) An aqueous solution was prepared by mixing 1 part by weight of aluminum nitrate nonahydrate, 0.2 parts by weight of polyvinyl alcohol with a degree of saponification of 90%, and 0.53 parts by weight of ethylenediamine. Ta. This aqueous solution was evaporated and dried at 150°C to obtain a mixed powder, which was then calcined in a nitrogen atmosphere at 1450''C for 10 hours to obtain aluminum nitride powder.
なお、この窒化アルミニウム粉末は、純度が９８％以上
、平均粒径が約１μｍであった。Note that this aluminum nitride powder had a purity of 98% or more and an average particle size of about 1 μm.
以上実施例１〜５で得た窒化アルミニウム粉末に対して
焼結補助剤としてのＹＺＯ：ｌを３ｗｔ％混合し、成形
後、１６５０℃の窒素雰囲気中で３時間焼成することに
よって、密度９８％以上の焼結窒化アルミニウムセラミ
ックを得ることができたこの発明にかかる窒化アルミニ
ウム粉末の製法は、上記実施例に限らない。実施例では
、炭素含有化合物および窒素含有化合物をそれぞれ用い
るようになっていたが、これらの代わりに炭素と窒素を
ともに含有する水溶性化合物を用いるようにしても構わ
ない。通常、窒化アルミニウムの焼結時には、焼結性を
向上させるために焼結補助剤として、酸化イツトリウム
などの希土類金属酸化物、酸化カルシウムなどのアルカ
リ土類金属酸化物を添加するのであるが、混合水溶液を
作る際に、塩化イツトリウムや硝酸カルシウムなどを同
時にこの混合水溶液中に添加するようにすれば、焼結補
助剤が均一に分散された窒化アルミニウム粉末がこの製
法によって得ることができる。The aluminum nitride powder obtained in Examples 1 to 5 was mixed with 3 wt% of YZO:l as a sintering aid, and after molding, it was baked in a nitrogen atmosphere at 1650°C for 3 hours to achieve a density of 98%. The method for producing aluminum nitride powder according to the present invention, by which the above sintered aluminum nitride ceramic can be obtained, is not limited to the above embodiments. In the examples, a carbon-containing compound and a nitrogen-containing compound are respectively used, but a water-soluble compound containing both carbon and nitrogen may be used instead. Normally, when sintering aluminum nitride, rare earth metal oxides such as yttrium oxide and alkaline earth metal oxides such as calcium oxide are added as sintering aids to improve sintering properties. By simultaneously adding yttrium chloride, calcium nitrate, etc. to the mixed aqueous solution when preparing the aqueous solution, aluminum nitride powder in which the sintering aid is uniformly dispersed can be obtained by this manufacturing method.
この発明′の窒化アルミニウム粉末の製法は、以上のよ
うに、アルミニウム酸化物前駆体、炭素含有化合物、お
よび、窒素含有化合物を水溶液として混合し、前記水溶
液から前記化合物の混合粉末を得、この混合粉末を非酸
化性雰囲気で焼成して窒化アルミニウム粉末を得るよう
になっているので、高純度で微粒子の易焼結性を有する
窒化アルミニウム粉末を安価で得ることができる。As described above, the method for producing aluminum nitride powder of the present invention involves mixing an aluminum oxide precursor, a carbon-containing compound, and a nitrogen-containing compound as an aqueous solution, obtaining a mixed powder of the compounds from the aqueous solution, and Since the powder is fired in a non-oxidizing atmosphere to obtain the aluminum nitride powder, it is possible to obtain the aluminum nitride powder with high purity and easy sinterability in the form of fine particles at a low cost.
Claims (1)
よび、窒素含有化合物を水溶液として混合し、前記水溶
液から前記化合物の混合粉末を得、この混合粉末を非酸
化性雰囲気で焼成して窒化アルミニウム粉末を得るよう
にする窒化アルミニウム粉末の製法。(1) Mix an aluminum oxide precursor, a carbon-containing compound, and a nitrogen-containing compound as an aqueous solution, obtain a mixed powder of the compound from the aqueous solution, and sinter this mixed powder in a non-oxidizing atmosphere to powder aluminum nitride. A method for producing aluminum nitride powder to obtain
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19974286A JPS6355109A (en) | 1986-08-26 | 1986-08-26 | Production of aluminum nitride powder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19974286A JPS6355109A (en) | 1986-08-26 | 1986-08-26 | Production of aluminum nitride powder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6355109A true JPS6355109A (en) | 1988-03-09 |
Family
ID=16412875
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19974286A Pending JPS6355109A (en) | 1986-08-26 | 1986-08-26 | Production of aluminum nitride powder |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6355109A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4985225A (en) * | 1987-10-26 | 1991-01-15 | Matsushita Electric Works, Ltd. | Process for producing aluminum nitride powders |
| WO2010008038A1 (en) * | 2008-07-17 | 2010-01-21 | 株式会社ブリヂストン | Aluminum nitride powder manufacturing method, aluminum nitride precursor, and manufacturing method for aluminum nitride sintered body using aluminum nitride powder |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS638206A (en) * | 1986-06-27 | 1988-01-14 | Mitsui Toatsu Chem Inc | Production of aluminum nitride |
-
1986
- 1986-08-26 JP JP19974286A patent/JPS6355109A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS638206A (en) * | 1986-06-27 | 1988-01-14 | Mitsui Toatsu Chem Inc | Production of aluminum nitride |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4985225A (en) * | 1987-10-26 | 1991-01-15 | Matsushita Electric Works, Ltd. | Process for producing aluminum nitride powders |
| WO2010008038A1 (en) * | 2008-07-17 | 2010-01-21 | 株式会社ブリヂストン | Aluminum nitride powder manufacturing method, aluminum nitride precursor, and manufacturing method for aluminum nitride sintered body using aluminum nitride powder |
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