JPS6353987A - Rotation induction terminal - Google Patents
Rotation induction terminalInfo
- Publication number
- JPS6353987A JPS6353987A JP61197591A JP19759186A JPS6353987A JP S6353987 A JPS6353987 A JP S6353987A JP 61197591 A JP61197591 A JP 61197591A JP 19759186 A JP19759186 A JP 19759186A JP S6353987 A JPS6353987 A JP S6353987A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic fluid
- rotation
- rotating shaft
- introduction terminal
- magnets
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000006698 induction Effects 0.000 title abstract 2
- 239000011553 magnetic fluid Substances 0.000 claims abstract description 23
- 238000010438 heat treatment Methods 0.000 claims abstract description 9
- 238000001816 cooling Methods 0.000 abstract description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 6
- 238000010276 construction Methods 0.000 abstract 1
- 230000008878 coupling Effects 0.000 abstract 1
- 238000010168 coupling process Methods 0.000 abstract 1
- 238000005859 coupling reaction Methods 0.000 abstract 1
- 238000004804 winding Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 4
- 229910052736 halogen Inorganic materials 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- -1 Hydrocarbon halides Chemical class 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】 〔産業上の利用分野〕 この発明は回転導入端子に関するものである。[Detailed description of the invention] [Industrial application field] This invention relates to a rotation introduction terminal.
例えば、希ガス−ハロゲンエキシマレーザなどのように
、レーザガスとして反応性の高いガスを用いるレーザに
おいては、レーザ筺体内にある構成材書き、これらのガ
スとの反ＩＰ３を、いかに抑制して、レーザガスの劣化
を防ぐかが、レーザを安定に動作させるための必須条件
である。For example, in a laser that uses a highly reactive gas as the laser gas, such as a rare gas-halogen excimer laser, how can the anti-IP3 of the constituent materials in the laser housing and these gases be suppressed? Preventing the deterioration of the laser is an essential condition for stable laser operation.
一方、連続発振のレーザや、高操９返しパルス発振のレ
ーザに訃いては、レーザ筺体内でレーザガスと循環させ
ることが必要である。このため、ガス循環用ファンの設
置が必須であるが、同ファン駆動用のモータに使用され
るオイルやグリースは、レーザガスの成分であるハロゲ
ンなどの反応性の、蓬いガスと反応しゃすく、ハイドロ
カーボンのハロゲン化物を生成し、ハロゲン濃度の減少
、生成した不純物であるハロゲン化物によるレーザ光の
吸収、レーザの光学系の汚染、などｔ引き起こし、レー
ザ動作をきわめて不安定なものにしてしまう。On the other hand, when using a continuous wave laser or a high frequency pulse oscillation laser, it is necessary to circulate the laser gas within the laser housing. For this reason, it is essential to install a gas circulation fan, but the oil and grease used in the motor to drive the fan will react with reactive gases such as halogens, which are components of the laser gas. Hydrocarbon halides are generated, resulting in a decrease in halogen concentration, absorption of laser light by the generated impurity halides, and contamination of the laser optical system, making laser operation extremely unstable.
このため、従来は、ファン駆動用モータをレーザ筺体外
に置き、残りのファン構成部分のみをレーザ筺体内に設
置し、かつ、これらを気密性の高い回転導入端子で連結
するという方式がとられている。For this reason, the conventional method was to place the fan drive motor outside the laser housing, install only the remaining fan components inside the laser housing, and connect them with a highly airtight rotation introduction terminal. ing.
第２図は、従来の磁性流体シールを用いた回転導入端子
の一部を切欠いて示す構成図である。FIG. 2 is a partially cutaway configuration diagram showing a rotation introduction terminal using a conventional magnetic fluid seal.
図において、１１】は回転導入端子、（２）は回転軸、
（３）は駆動用モータ、１４１はマグネツ）、＋６１は
磁性流体、（８１は０−リング、（７）はレーザ筺体、
（８）はファン、（９）は水冷用ジャケットである。In the figure, 11] is a rotation introduction terminal, (2) is a rotation shaft,
(3) is the drive motor, 141 is the magnet), +61 is the magnetic fluid, (81 is the 0-ring, (7) is the laser housing,
(8) is a fan, and (9) is a water cooling jacket.
次に動作について説明する。１ず複数個のマグネツ）＋
４１ｉ同極性同志が対向する様に配設する。これによ抄
相反発する磁束線が局所に集中する構造となり、磁性流
体１５）が回転軸（２）上のシール部に集中し、気体の
シールが行なわれるというのが磁性流体シールを用いる
回転導入端子Ｉｌ＋の原理である。回転導入端子・１１
は０−リング＋６１ ＶＣよって密閉構造を保つように
レーザ筐体（））に取り付けられ、その回転軸（２１の
両端はそれぞれ、モータ（３）とファン１８）に連結さ
れている。従来、回転数が大きくなると、磁性流体の攪
拌熱が発生するため、これを冷却する目的で冷却用シャ
グツト（９）が設けられており、水冷等による間接冷却
が行なわれている。Next, the operation will be explained. 1.Multiple magnets)+
41i are arranged so that comrades of the same polarity face each other. This creates a structure in which the magnetic flux lines generated by the papermaking phase are locally concentrated, and the magnetic fluid 15) is concentrated on the seal part on the rotating shaft (2), thereby sealing the gas.Introducing rotation using a magnetic fluid seal This is the principle of terminal Il+. Rotation introduction terminal・11
is attached to the laser casing (21) using an O-ring +61 VC to maintain a sealed structure, and both ends of its rotating shaft (21) are connected to the motor (3) and fan 18, respectively. Conventionally, when the rotational speed increases, stirring heat of the magnetic fluid is generated, so a cooling shag (9) is provided for the purpose of cooling this, and indirect cooling is performed by water cooling or the like.
第１図は、回転導入端子の電圧印加後の立ち上り特性図
であり、縦＠け回転数変化金〔回転Ｖ所定の回転数〕で
示し、横軸は電圧印加後の時間〔分〕で示す。図中、（
ロ）は上記従来の回転導入端子の７ち上り特性であり、
それによると、従来の回転導入端子はモータ１３）に電
圧を印加してから、ファンの回転数が所定噴に達するま
での所要時間は、レーザ筐体内ガス圧力（Ｈ８）８気圧
、モータ動力１４０Ｗ、外気温度１１１０℃。Fig. 1 is a characteristic diagram of the rise after voltage is applied to the rotation introduction terminal, and the vertical axis shows the change in rotation speed (rotation V) (predetermined rotation speed), and the horizontal axis shows the time (minutes) after voltage application. . In the figure, (
B) is the 7 rise characteristic of the above conventional rotation introduction terminal,
According to this, the time required for the conventional rotation introduction terminal to apply voltage to the motor 13) until the rotation speed of the fan reaches a predetermined speed is as follows: Gas pressure inside the laser housing (H8) is 8 atmospheres, and motor power is 140 W. , outside temperature 1110℃.
の条件下では、１０分以上を必要としている。Under these conditions, 10 minutes or more is required.
もちろん所要時間に動作環境によって異なるが一般に数
分を要するのが普通である。これは、磁性流体が低温に
おいて高い粘性を持つためであって、回転している内に
、攪拌熱によって、昇温し、粘性が低くなって、スムー
ズに回転し始めるためである。Of course, the time required varies depending on the operating environment, but generally it takes several minutes. This is because the magnetic fluid has high viscosity at low temperatures, and as it rotates, the temperature rises due to the heat of stirring, the viscosity decreases, and it begins to rotate smoothly.
従来の磁性流体を用りた回転導入端子に以上のように稼
動開始と同時に所望の回転数を得るためには、稼動初期
段階のみに、モータ印加電圧を増大するか、ギヤ構造を
利用するなどして過大な回転力を加えてやる必要があり
、また、所望の回転数に対応した回転力を印加していた
のでは、同回転数に立ち上がるまでに長時間を要するな
ど回転導入端子を用いた装置自身の立ち上げ時間を極め
て長いものにし、メンテナンス性を悪くする等の問題点
があった。In order to obtain the desired rotation speed as soon as the operation starts using the conventional rotation introduction terminal using magnetic fluid, it is necessary to increase the voltage applied to the motor only in the initial stage of operation or use a gear structure. In addition, if the rotation force corresponding to the desired rotation speed was applied, it would take a long time to reach the same rotation speed, making it difficult to use the rotation introduction terminal. There were problems such as an extremely long start-up time for the equipment itself and poor maintainability.
この発明は、かかる問題点を解消するためになされたも
ので、電圧印加後、より短い時間で所望の回転数を得る
ことのできる回転導入端子？得ることを、目的とする。This invention was made in order to solve this problem, and it is a rotation introduction terminal that can obtain the desired rotation speed in a shorter time after applying a voltage. The purpose is to obtain.
この発明の回転導入端子は、被回転体とモータ七律桔す
る回転軸、回転軸を介在させて同極性同志が対向するよ
うに設けられたマグネット、マグネット間に設けられた
磁性流体、および上記磁性流体の加熱手段（ｉ−備えた
ものである。The rotation introduction terminal of the present invention includes a rotating shaft that connects a rotating body and a motor, a magnet provided with the rotating shaft interposed so that the same polarity faces face each other, a magnetic fluid provided between the magnets, and the above-mentioned magnetic fluid. Fluid heating means (i-equipped).
この発明における２７０Ｍ手段により、磁性流体の昇温
を促進し、迅速な磁性流体の粘性低下即ち回転抵抗の減
少を実現することにより目的を達成する。The 270M means of the present invention achieves the object by promoting the temperature increase of the magnetic fluid and quickly reducing the viscosity of the magnetic fluid, that is, reducing the rotational resistance.
第１図中の曲ａ（イ）はこの発明の一実施例を示す回転
導入端子の立ち上り特性であり、第２図における冷却ジ
ャケット（９）に稼動開始と同時に、５０℃の温水を流
した場合で、約４分で所定の回転数に達していることが
解る。Curve a (a) in Fig. 1 is the rise characteristic of the rotation introduction terminal showing one embodiment of this invention, and 50°C hot water was poured into the cooling jacket (9) in Fig. 2 at the same time as the start of operation. It can be seen that the predetermined rotation speed is reached in about 4 minutes.
なお、加熱温度は２０°Ｃ〜８０℃が望ましい。Note that the heating temperature is preferably 20°C to 80°C.
２０℃以下では効率か少なく、８０’Ｃ以上では周知の
磁性流体の溶媒が気化し始めるからである。This is because the efficiency is low below 20°C, and the solvent of the well-known magnetic fluid begins to vaporize above 80'C.
また、この発明に係わる加熱手段として框、例えば上記
実施例に示されたような冷却用ジャケットへの温水の流
入および回転導入端子は）へのヒータの巻き付けなどが
ある。Further, heating means according to the present invention include wrapping a heater around a stile, for example, the inflow of hot water into a cooling jacket and the rotation introduction terminal as shown in the above embodiments.
以下説明したとおり、この発明は被回転体とモータを１
結する回転軸、回転軸を介在させて同極性同志が対向す
るように設けられたマグネット、マグネット間に設けら
れた磁性流体、および上記磁性流体の加熱手段を備えた
ものを用いることによシ、電圧印加後、より短い時間で
所望の回転数２得ることのできる回転導入端子を得るこ
とができる。As explained below, this invention combines a rotated body and a motor into one
By using a rotating shaft that connects the magnets, magnets with the same polarity facing each other with the rotating shaft interposed between them, a magnetic fluid provided between the magnets, and a heating means for the magnetic fluid. , it is possible to obtain a rotation introduction terminal that can obtain the desired number of rotations 2 in a shorter time after voltage application.
第１図は回転導入端子の電圧印加後の宜ち上り特性図、
第２図は従来の回転導入端子の一部を切欠いて示す構成
図である。
図において、（ロ）はこの発明の一実施例の回転導入端
子の立ち上り特性である。Figure 1 is a ramp-up characteristic diagram after voltage is applied to the rotation introduction terminal.
FIG. 2 is a partially cut away configuration diagram of a conventional rotation introduction terminal. In the figure, (b) shows the rise characteristic of the rotation introduction terminal according to an embodiment of the present invention.
Claims (2)
在させて同極性同志が対向するように設けられたマグネ
ット、マグネット間に設けられた磁性流体、および上記
磁性流体の加熱手段を備えた回転導入端子。(1) A rotating shaft connecting the rotated body and the motor, magnets provided with the same polarity facing each other with the rotating shaft interposed therebetween, a magnetic fluid provided between the magnets, and a heating means for the magnetic fluid. Rotation introduction terminal equipped.
第１項記載の回転導入端子。(2) The rotation introduction terminal according to claim 1, wherein the heating temperature is 20°C to 80°C.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61197591A JPS6353987A (en) | 1986-08-22 | 1986-08-22 | Rotation induction terminal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61197591A JPS6353987A (en) | 1986-08-22 | 1986-08-22 | Rotation induction terminal |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6353987A true JPS6353987A (en) | 1988-03-08 |
Family
ID=16377030
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61197591A Pending JPS6353987A (en) | 1986-08-22 | 1986-08-22 | Rotation induction terminal |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6353987A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997039502A1 (en) * | 1996-04-15 | 1997-10-23 | Komatsu Ltd. | Gas laser |
| JPWO2007114051A1 (en) * | 2006-03-31 | 2009-08-13 | イーグル工業株式会社 | Magnetic fluid seal device |
| JP2013532354A (en) * | 2010-05-28 | 2013-08-15 | アクセリス テクノロジーズ， インコーポレイテッド | Heated rotary seal and bearing for cooled ion implantation system |
-
1986
- 1986-08-22 JP JP61197591A patent/JPS6353987A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997039502A1 (en) * | 1996-04-15 | 1997-10-23 | Komatsu Ltd. | Gas laser |
| JPWO2007114051A1 (en) * | 2006-03-31 | 2009-08-13 | イーグル工業株式会社 | Magnetic fluid seal device |
| JP2013532354A (en) * | 2010-05-28 | 2013-08-15 | アクセリス テクノロジーズ， インコーポレイテッド | Heated rotary seal and bearing for cooled ion implantation system |
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