JPS62181480A - Gas laser oscillator - Google Patents
Gas laser oscillatorInfo
- Publication number
- JPS62181480A JPS62181480A JP2203186A JP2203186A JPS62181480A JP S62181480 A JPS62181480 A JP S62181480A JP 2203186 A JP2203186 A JP 2203186A JP 2203186 A JP2203186 A JP 2203186A JP S62181480 A JPS62181480 A JP S62181480A
- Authority
- JP
- Japan
- Prior art keywords
- blower
- laser oscillator
- gas
- gas laser
- braking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001172 regenerating effect Effects 0.000 claims abstract description 5
- 230000006698 induction Effects 0.000 claims abstract description 3
- 230000002159 abnormal effect Effects 0.000 abstract description 3
- 230000000694 effects Effects 0.000 abstract description 2
- 230000005856 abnormality Effects 0.000 description 4
- 238000010792 warming Methods 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000000819 phase cycle Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Lasers (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はガスレーザ発振器に係り、特に孔明加工、溶接
、焼入れ及び切断加工などに使用される大出力のガスレ
ーザ発振器のレーザガス循環のための送風装置の改良に
関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a gas laser oscillator, and in particular to a blower device for laser gas circulation in a high-output gas laser oscillator used for drilling, welding, hardening, cutting, etc. Regarding the improvement of
既に使用されているこの種のガスレーザ発振器は上側に
放電部と共振器を設け、下側にレーザガスを循環させる
送風装置を設け、また両側に風洞を取付け、この風洞は
放電部及び送風装置と連通し、風洞内部は低圧のレーザ
ガスが封入され、風洞内にこの循環されるレーザガスを
冷却する熱交換器を設ける。そして送風装置によりレー
ザガスを循環し、放電部の放電及び共振器によってレー
ザガスを励起し、一方の共振器からレーザ光を得るもの
であるにのように放電が安定化され、大出力のレーザ光
を安定して得るためには放電により、加熱されたレーザ
ガスが送風装置により循環され、熱交換器で冷却しなけ
ればならない。また、送風装置に設けられる送風機は１
／２０気圧程度の低圧のレーザガスを高速で循環させる
ためインバータによって駆動されている。This kind of gas laser oscillator, which is already in use, has a discharge part and a resonator on the upper side, a blower device to circulate the laser gas on the lower side, and a wind tunnel on both sides, which communicates with the discharge part and the blower. However, a low-pressure laser gas is sealed inside the wind tunnel, and a heat exchanger is provided to cool the laser gas that is circulated within the wind tunnel. Then, the laser gas is circulated by the blower, the laser gas is excited by the discharge in the discharge section and the resonator, and the discharge is stabilized as in the case where laser light is obtained from one of the resonators, producing a high-output laser light. In order to obtain stable results, the laser gas heated by the discharge must be circulated by a blower and cooled by a heat exchanger. In addition, the blower installed in the blower device is 1
It is driven by an inverter to circulate the laser gas at a low pressure of about /20 atm at high speed.
放電異常などの一時的な異常に対し、インバータを急に
停止させると、送風機はレーザガスの圧力が低いため、
回転抵抗が小さくなっているので長時間空転していてな
かなか停止しない。このような空回りしている送風機を
再びインバータで駆動しようとすると交流電流が流れ、
インバータの過電流保護回路によりインバータが停止し
てしまう。このため送風機が停止するまでまってからイ
ンバータを動作させなければならない。If you suddenly stop the inverter due to a temporary abnormality such as a discharge abnormality, the blower will stop due to the low laser gas pressure.
Since the rotational resistance is low, it is difficult to stop even if it idles for a long time. If you try to drive a blower that is idling like this again with an inverter, an alternating current will flow,
The inverter stops due to the overcurrent protection circuit of the inverter. Therefore, it is necessary to wait until the blower stops before operating the inverter.
またガスレーザ発振器の光軸はガスレーザ発振器が長時
間運転された時に最適となるように調整されているので
、レーザ発振器を長時間停止させるとこのガスレーザ発
振器自身も冷却してしまうため、次に運転する際にガス
レーザ発振器が十分温まるまでウオーミングアツプが必
要となる６さらにこのガスレーザ発振器は溶接装置、切
断装置などのエネルギ源として生産ラインに採用されて
いるので、万一ガスレーザ発振器が長時間停止するとい
うことは、生産ラインの停止をまねくことになるという
改良すべき問題点があった。In addition, the optical axis of the gas laser oscillator is adjusted to be optimal when the gas laser oscillator is operated for a long time, so if the laser oscillator is stopped for a long time, the gas laser oscillator itself will cool down, so when the gas laser oscillator is operated next time. In some cases, warming up is required until the gas laser oscillator is sufficiently warmed up.6Furthermore, since this gas laser oscillator is used on the production line as an energy source for welding equipment, cutting equipment, etc., in the unlikely event that the gas laser oscillator stops for a long time. However, there was a problem that needed to be improved, as it would lead to production line stoppages.
本発明は上記の点を考慮してなされたもので、その目的
とするところはガスレーザ発振器の停止及び再起動を速
かに行え、ウオーミングアツプ時間を短縮することので
きるガスレーザ発振器を提供することにある。The present invention has been made in consideration of the above points, and its purpose is to provide a gas laser oscillator that can quickly stop and restart the gas laser oscillator and shorten the warming-up time. be.
かかる目的を達成するために本発明によれば、ガスレー
ザ発振器の送風機の停止を回生制動あるいは誘導制動の
ような電気的制動をかけて行い機械的ブレーキの不足を
補うようにして、送風機の停止及び再起動を速かに行う
ようにする。In order to achieve this object, according to the present invention, the blower of the gas laser oscillator is stopped by applying electric braking such as regenerative braking or induction braking to compensate for the lack of mechanical brake. Make the reboot faster.
［作 用〕
このようにガスレーザ発振器の送風機の停止を電気的制
動によって速かに行うことにより、送風機の再起動を直
ちに行うことができるので、ウオーミングアツプ時間を
短縮することができる。[Function] By quickly stopping the blower of the gas laser oscillator using electrical braking in this manner, the blower can be restarted immediately, thereby shortening the warm-up time.
以下、本発明の一実施例を第１図ないし第３図を参照し
て説明する。ガスレーザ発振器１０は第２図及び第３図
に示すように通常の構成である。すなわち、例えば断面
が半円形の風洞１１ａ、 ｌｌｂを両側に配置し、その
両者間を上側流路１２と下側流路１３で連通接続する。Hereinafter, one embodiment of the present invention will be described with reference to FIGS. 1 to 3. The gas laser oscillator 10 has a conventional configuration as shown in FIGS. 2 and 3. That is, for example, wind tunnels 11a and 11b each having a semicircular cross section are arranged on both sides, and the upper channel 12 and the lower channel 13 communicate with each other.
そして、上側流路１２のほぼ中央に放電部１５を設け、
またこの放電部１５に共振器１６を設ける。そして例え
ば風洞１１ａ内部に熱交換器１８を配設する。また下側
流路１３には送風機１９ａを有する送風装置１９が連結
され、風洞１１ａ、 ］、１ｂ上側及び下側流路１２．
１３内部に低圧のレーザガスを封入してガスレーザ発振
器１０が構成される。Then, a discharge section 15 is provided approximately in the center of the upper channel 12,
Further, a resonator 16 is provided in this discharge section 15. For example, a heat exchanger 18 is disposed inside the wind tunnel 11a. Further, a blower device 19 having a blower 19a is connected to the lower flow path 13, and includes wind tunnels 11a, 1b, upper and lower flow paths 12.
A gas laser oscillator 10 is constructed by sealing a low-pressure laser gas inside the gas laser oscillator 13 .
放電部１５と共振器１６とによってレーザガスが励起さ
れ、レーザ光を得るが、放電を安定化し、大出力のレー
ザ光を安定して得るために放電により加熱されたレーザ
ガスを送風装置１９の送風機１９ａによって循環させて
熱交換器１８により冷却している。The laser gas is excited by the discharge section 15 and the resonator 16 to obtain laser light, but in order to stabilize the discharge and stably obtain high-output laser light, the laser gas heated by the discharge is passed through the blower 19a of the blower device 19. The heat exchanger 18 circulates the water and cools it.
そして送風＠ １９ ａは１／２０気圧程度の低圧のレ
ーザガスを高速で循環させるため、インバータにより駆
動されている。このようなガスレーザ発振器１０におい
て、放電異常などにより、送風機１９ａを急速に停止し
たいときに、次に述べるようにして急速に停止させるこ
とができる。The air blower @19a is driven by an inverter to circulate the laser gas at a low pressure of about 1/20 atmosphere at high speed. In such a gas laser oscillator 10, when it is desired to quickly stop the blower 19a due to abnormal discharge or the like, the blower 19a can be stopped quickly as described below.
第１図は送風機１９ａに停止命令が出てからの送風機１
９ａの回転数の変化及びインバータの周波数設定の変化
を縦軸にとり、横軸に経過した時間をとった線図である
。この第１図に示すように停止命令発生後ある減少率を
もってインバータの周波数が低下するようになっている
。これにより、送風機１９８は発電機として動作する。Figure 1 shows the state of the blower 1 after the stop command was issued to the blower 19a.
9a is a diagram in which the vertical axis represents the change in the rotational speed of the motor 9a and the frequency setting of the inverter, and the horizontal axis represents the elapsed time. FIG. As shown in FIG. 1, the frequency of the inverter decreases at a certain rate after the stop command is issued. Thereby, the blower 198 operates as a generator.
このようにして送風機１９ａの回転のエネルギーを電力
として電源へ返還する、すなわち電気的制動としていわ
ゆる回生制動することにより、送風機１９ａを速かに停
止することができるので、再起動の際にウオーミングア
ツプ時間を短縮することができる。In this way, by returning the rotational energy of the blower 19a to the power source as electric power, that is, by performing so-called regenerative braking as electrical braking, the blower 19a can be stopped quickly, so that warming up is possible when the blower 19a is restarted. It can save time.
次に本発明の他の実施例として、送風機１９ａの停止命
令後インバータの出力相順を変えて送風機１９ａの回転
子の回転方向を反対方向に回転磁界を発生させて、電気
的制動としていわゆる誘導制動により送風機１９ａに電
気ブレーキをかけることもできる。Next, as another embodiment of the present invention, after the blower 19a is commanded to stop, the output phase sequence of the inverter is changed to generate a rotating magnetic field in the opposite direction to the rotation direction of the rotor of the blower 19a. An electric brake can also be applied to the blower 19a by braking.
以上説明したように本発明によれば、放電異常などの一
時的な異常に対し、送風機に電気的制動を加え送風機の
空転を防止して、速かに停止できるので、送風機停止後
のガスレーザ発振器の起動を索速く行え、ウオーミング
アンプ時間の短縮をはかることのできるガスレーザ発振
器を提供することができる。As explained above, according to the present invention, in the event of a temporary abnormality such as a discharge abnormality, the blower can be electrically braked to prevent the blower from idling and can be stopped quickly. It is possible to provide a gas laser oscillator that can start up quickly and shorten the warming amplifier time.
４、 図面の＠ 、＋１．な説明
第１図は本発明のレーザ異常時の送風機の回転数とイン
バータ周波数とを示す線図、第２図及び第３図は夫々本
発明のガスレーザ発振器の平面図及び側面図である。4. @ of the drawing, +1. Explanation FIG. 1 is a diagram showing the rotation speed of the blower and the inverter frequency when the laser is abnormal according to the present invention, and FIGS. 2 and 3 are a plan view and a side view, respectively, of the gas laser oscillator of the present invention.
１０・・・ガスレーザ発振器、 ｌｌａ、 １．１
ｂ・・・風洞。10...Gas laser oscillator, lla, 1.1
b...Wind tunnel.
１２、１３・・・上側及び下側流路、１５・・・放電部
。12, 13... Upper and lower flow paths, 15... Discharge section.
１６・・・共振器、１８・・・熱交換器。16... Resonator, 18... Heat exchanger.
１９・・・送風装置、１９ａ・・・送風機。19...Blower device, 19a...Blower.
Claims (2)
振器を設け、前記風洞内に封入されるレーザガスを循環
させる送風機を有する送風装置を設け前記送風機をイン
バータで駆動するガスレーザ発振器において、送風機の
停止動作時に前記送風機を電気的制動によって停止させ
ることを特徴とするガスレーザ発振器。(1) In a gas laser oscillator, a discharge part communicating with the inside of a wind tunnel is provided, a resonator is provided in the discharge part, a blower device having a blower for circulating laser gas sealed in the wind tunnel is provided, and the blower is driven by an inverter. A gas laser oscillator, characterized in that the blower is stopped by electrical braking when the blower is stopped.
許請求の範囲第１項記載のガスレーザ発振器。(2) The gas laser oscillator according to claim 1, wherein the electrical braking is regenerative braking or induction braking.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2203186A JPS62181480A (en) | 1986-02-05 | 1986-02-05 | Gas laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2203186A JPS62181480A (en) | 1986-02-05 | 1986-02-05 | Gas laser oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62181480A true JPS62181480A (en) | 1987-08-08 |
Family
ID=12071605
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2203186A Pending JPS62181480A (en) | 1986-02-05 | 1986-02-05 | Gas laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62181480A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9620926B2 (en) | 2014-04-11 | 2017-04-11 | Fanuc Corporation | Laser machining apparatus changing operation based on length of power-down time |
| CN111670520A (en) * | 2018-03-26 | 2020-09-15 | 极光先进雷射株式会社 | Laser gas management system, method for manufacturing electronic device, and method for controlling excimer laser system |
-
1986
- 1986-02-05 JP JP2203186A patent/JPS62181480A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9620926B2 (en) | 2014-04-11 | 2017-04-11 | Fanuc Corporation | Laser machining apparatus changing operation based on length of power-down time |
| DE102015004482B4 (en) | 2014-04-11 | 2021-08-12 | Fanuc Corporation | LASER PROCESSING DEVICE WITH CHANGE OF OPERATION ACCORDING TO THE LENGTH OF A POWER SWITCH-OFF TIME |
| CN111670520A (en) * | 2018-03-26 | 2020-09-15 | 极光先进雷射株式会社 | Laser gas management system, method for manufacturing electronic device, and method for controlling excimer laser system |
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