JPS635385U - - Google Patents
Info
- Publication number
- JPS635385U JPS635385U JP9591686U JP9591686U JPS635385U JP S635385 U JPS635385 U JP S635385U JP 9591686 U JP9591686 U JP 9591686U JP 9591686 U JP9591686 U JP 9591686U JP S635385 U JPS635385 U JP S635385U
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- deposition material
- crucible
- melting
- detection means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims 2
- 238000002844 melting Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9591686U JPS635385U (et) | 1986-06-25 | 1986-06-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9591686U JPS635385U (et) | 1986-06-25 | 1986-06-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS635385U true JPS635385U (et) | 1988-01-14 |
Family
ID=30961081
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9591686U Pending JPS635385U (et) | 1986-06-25 | 1986-06-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS635385U (et) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100471361B1 (ko) * | 2002-09-25 | 2005-03-10 | 엘지전자 주식회사 | 유기 전계 발광 소자 증착 장치 |
-
1986
- 1986-06-25 JP JP9591686U patent/JPS635385U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100471361B1 (ko) * | 2002-09-25 | 2005-03-10 | 엘지전자 주식회사 | 유기 전계 발광 소자 증착 장치 |