JPS635385U - - Google Patents
Info
- Publication number
- JPS635385U JPS635385U JP9591686U JP9591686U JPS635385U JP S635385 U JPS635385 U JP S635385U JP 9591686 U JP9591686 U JP 9591686U JP 9591686 U JP9591686 U JP 9591686U JP S635385 U JPS635385 U JP S635385U
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- deposition material
- crucible
- melting
- detection means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims 2
- 238000002844 melting Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
Description
第１図ないし第３図は第１実施例に係り、第１
図は真空蒸着装置の断面図、第２図はルツボを示
す斜視図、第３図は第１実施例のＡ―Ａ端面図で
ある。第４図ないし第６図は第２実施例に係り、
第４図はルツボを示す斜視図、第５図はＢ―Ｂ端
面図、第６図は検出手段を示すブロツク図である
。
７，１２……ルツボ、７ａ，７ｂ，７ｃ……溝
、１３ａ，１３ｂ，１３ｃ……発光素子、１４ａ
，１４ｂ，１４ｃ……受光素子、１６……検出回
路、１７……表示回路、２０……蒸着材料。
Figures 1 to 3 relate to the first embodiment;
The figure is a sectional view of the vacuum evaporation apparatus, FIG. 2 is a perspective view showing a crucible, and FIG. 3 is an AA end view of the first embodiment. 4 to 6 relate to the second embodiment,
FIG. 4 is a perspective view showing the crucible, FIG. 5 is a BB end view, and FIG. 6 is a block diagram showing the detection means. 7, 12... Crucible, 7a, 7b, 7c... Groove, 13a, 13b, 13c... Light emitting element, 14a
, 14b, 14c... Light receiving element, 16... Detection circuit, 17... Display circuit, 20... Vapor deposition material.
Claims (1)
材料の残量を検出する検出手段を設けたことを特
徴とする真空蒸着装置における蒸着材料の溶融ル
ツボ。 A crucible for melting vapor deposition material in a vacuum vapor deposition apparatus, characterized in that a detection means for detecting the remaining amount of the vapor deposition material is provided on the inner surface of the crucible for melting the vapor deposition material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9591686U JPS635385U (en) | 1986-06-25 | 1986-06-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9591686U JPS635385U (en) | 1986-06-25 | 1986-06-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS635385U true JPS635385U (en) | 1988-01-14 |
Family
ID=30961081
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9591686U Pending JPS635385U (en) | 1986-06-25 | 1986-06-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS635385U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100471361B1 (en) * | 2002-09-25 | 2005-03-10 | 엘지전자 주식회사 | Apparatus for depositing organic- electroluminescent device |
-
1986
- 1986-06-25 JP JP9591686U patent/JPS635385U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100471361B1 (en) * | 2002-09-25 | 2005-03-10 | 엘지전자 주식회사 | Apparatus for depositing organic- electroluminescent device |