JPS63150374U - - Google Patents
Info
- Publication number
- JPS63150374U JPS63150374U JP4318087U JP4318087U JPS63150374U JP S63150374 U JPS63150374 U JP S63150374U JP 4318087 U JP4318087 U JP 4318087U JP 4318087 U JP4318087 U JP 4318087U JP S63150374 U JPS63150374 U JP S63150374U
- Authority
- JP
- Japan
- Prior art keywords
- vapor
- deposited layer
- preparation
- utility
- aluminum oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002209 hydrophobic effect Effects 0.000 claims description 2
- 238000007689 inspection Methods 0.000 claims description 2
- 238000002360 preparation method Methods 0.000 claims description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Investigating Or Analysing Biological Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4318087U JPS63150374U (et) | 1987-03-24 | 1987-03-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4318087U JPS63150374U (et) | 1987-03-24 | 1987-03-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63150374U true JPS63150374U (et) | 1988-10-04 |
Family
ID=30859797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4318087U Pending JPS63150374U (et) | 1987-03-24 | 1987-03-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63150374U (et) |
-
1987
- 1987-03-24 JP JP4318087U patent/JPS63150374U/ja active Pending