JPS6353452A - Lighting apparatus for inspection - Google Patents
Lighting apparatus for inspectionInfo
- Publication number
- JPS6353452A JPS6353452A JP19832086A JP19832086A JPS6353452A JP S6353452 A JPS6353452 A JP S6353452A JP 19832086 A JP19832086 A JP 19832086A JP 19832086 A JP19832086 A JP 19832086A JP S6353452 A JPS6353452 A JP S6353452A
- Authority
- JP
- Japan
- Prior art keywords
- inspected
- light
- fiber bundle
- inspection
- optical fiber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007689 inspection Methods 0.000 title claims abstract description 21
- 239000013307 optical fiber Substances 0.000 claims abstract description 27
- 238000005286 illumination Methods 0.000 claims description 17
- 239000000835 fiber Substances 0.000 abstract description 3
- 238000011179 visual inspection Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000002775 capsule Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 235000013305 food Nutrition 0.000 description 1
- 238000011027 product recovery Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野〕
この発明は、医薬品く錠剤、カプセル等）、食品、機械
部品、電子部品等の外観の欠損を検出するための検査用
照明装置に関するものである。[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to an inspection lighting device for detecting defects in the appearance of pharmaceutical tablets, capsules, etc.), foods, mechanical parts, electronic parts, etc. be.
第４図は通常の錠剤外観検査装置を示す説明図であり、
この検査装置は錠剤である被検査物ｍの水平用送方向に
沿ってホッパ４０、パイブレーク４１を存するフィーダ
４２、撮動トラフ４３、錠剤整流値２４４、ベルトコン
ベア４５、第１の搬送装り￥ｘ＋、第２の搬送装置×２
および錠剤選別機構４６がこの頃に配列されて構成され
る。錠剤選別機構４６の下方には良品同収用ダクト４７
と不良品回収用ダクト４８とが設けられる。FIG. 4 is an explanatory diagram showing a normal tablet appearance inspection device,
This inspection device includes a hopper 40, a feeder 42 having a pie break 41, a photographing trough 43, a tablet rectification value 244, a belt conveyor 45, and a first conveyance device along the horizontal feeding direction of the inspected object m, which is a tablet. ￥x+, second transport device x 2
and tablet sorting mechanism 46 are arranged and configured around this time. Below the tablet sorting mechanism 46 is a duct 47 for collecting good products.
and a defective product recovery duct 48 are provided.
前記搬送装置Ｘ＋、Ｘ２はバキュームコンヘアで被検査
物ｍをそのコンヘア上に吸着した状態で搬送する。そし
て、搬送過程において、外観検査装置Ｔ、〜Ｔ６で被検
査物ｍの外観の欠！ｆ＋の右筆を検出し、これに基づい
て錠剤１返別機１イ４６で被検査物ｍの振り分けが行わ
れる。かかる外観検査装置Ｔ１〜Ｔ６では、被検査物ｍ
を撮像するイメージセンサと被検査物ｍを照明する照明
装置とが設けられ、搬送される被Ｉ★青物ｍを均言コこ
ｕ（（明しながらイメージセンサ（ラインセン４トカメ
ラ）“被検査物ｍの外観の欠損を検出１−る。The conveyance devices X+ and X2 convey the object to be inspected m by means of vacuum con-hairs while being adsorbed onto the con-hairs. During the transportation process, the appearance inspection devices T, to T6 detect defects in the appearance of the object m to be inspected. The right stroke of f+ is detected, and on the basis of this, the tablet 1 sorting machine 1-46 sorts out the objects m to be inspected. In such visual inspection apparatuses T1 to T6, the object to be inspected m
An image sensor that captures an image of the object m to be inspected and a lighting device that illuminates the object m to be inspected are installed. Detect defects in the appearance of m.
この場合、照明装置として（よ、光源からの光を直接被
検査物ｍに８６明する２Ｆまたは被検査物ｍの検査面よ
り均質な反射光を得るために光源からの光を照明ドーム
内で反射あるいは拡散させて間接ｐ％：明する装置が用
いられていた。In this case, as an illumination device, the light from the light source is directly illuminated on the inspection object m, or the light from the light source is illuminated within the illumination dome in order to obtain homogeneous reflected light from the inspection surface of the inspection object m. A device was used that indirectly illuminated by reflection or diffusion.
搬送装置×１〜×２によって高速度で搬送され乙被検査
物ｍをイメージセンサを用いて高精度な外観検査を行う
ためには、高を１度でしかも被検査物ｍの表面形状に応
じた均質開明可能なｌＩｒ；明装置が必要となる。とく
に、ラインセンサカメラを用いて高速外観検査を行う場
合、走査周期が短くなり、検査上充分なゲインを得るた
めには、高輝度でかつ均質な照明が必要となる。In order to perform a high-precision visual inspection of the inspected object (m) transported at high speed by the conveying device x1 to x2 using an image sensor, the height must be set at one degree and according to the surface shape of the inspected object (m). A homogeneous illuminating device is required. In particular, when high-speed visual inspection is performed using a line sensor camera, the scanning period becomes short, and in order to obtain sufficient gain for inspection, high-intensity and homogeneous illumination is required.
しかしながら、被検査′ｆ４：Ａｍを元凶からの光で直
接陣門する従来の照明装置では、直接光による被検査物
ｍの表面の明度差が大きく均質照明が困難であり、また
均質化のためには′＄数の光源を必要とするため、経済
上の問題があった。However, with the conventional illumination device that directly illuminates the object to be inspected 'f4:Am with light from the source, it is difficult to achieve uniform illumination due to the large brightness difference on the surface of the object to be inspected due to the direct light. This poses an economical problem because it requires several light sources.
一方、間接照明による従来の他の照明装置では、均質照
明効果が得られるものの、被検査物ｍの表面が低輝度で
あるため検査に必要な高い光量が得られないため、高速
外観検査ができないという問題があった。On the other hand, other conventional lighting devices using indirect lighting can achieve a homogeneous illumination effect, but because the surface of the object to be inspected m has low luminance, it is not possible to obtain the high amount of light required for inspection, making it impossible to conduct high-speed visual inspections. There was a problem.
したがって、この発明の目的は、被検査物を高輝度でか
つ均質に照明することができ、高速外観検査を可能にす
るとともに、低廉な検査用照明装置を提供することであ
る。SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide an inexpensive inspection lighting device that can uniformly illuminate an object to be inspected with high brightness, enables high-speed visual inspection, and is inexpensive.
この発明の検査用照明装置は、光源と、この光源の前面
に受光部を配置しかつ複数の分岐した投光部で被検査物
を多方向から照明する光ファイバ束と、この光ファイバ
束の前記投光部と前記被）★金物との間に介在した拡散
透光外部材とを備えたものである。The inspection lighting device of the present invention includes a light source, an optical fiber bundle in which a light receiving section is arranged in front of the light source and illuminates an object to be inspected from multiple directions with a plurality of branched light projecting sections, and the optical fiber bundle. The light emitting device includes a diffused light-transmitting outer member interposed between the light projecting portion and the metal object.
この発明によれば、以下の作用がある。 According to this invention, there are the following effects.
（Ａ） 光ファイバ束の投光部を、被検査物の照明バ
ランスが崩れない程度に被検査物に近づけることができ
、被検査物の表面を高輝度に照明できる。(A) The light projecting portion of the optical fiber bundle can be brought close to the object to be inspected to the extent that the illumination balance of the object to be inspected is not disrupted, and the surface of the object to be inspected can be illuminated with high brightness.
（Ｂ） 光ファイバ東を分岐させて複数の投光部を形
成し、この投光部で様々な位置から被検査物を照明する
ので均質照明がつくりやすい。また、投光部を出た光は
拡散透光外部材を通過することによって拡散され、被検
査物をより一層均質に照明することができ、上記（、Ａ
）と相まって高速外観検査が可催になる。(B) The optical fiber east is branched to form a plurality of light projecting sections, and the test object is illuminated from various positions with the light projecting sections, making it easy to create homogeneous illumination. In addition, the light emitted from the light projecting section is diffused by passing through the diffused light-transmitting external material, and the object to be inspected can be illuminated even more uniformly.
), it becomes possible to perform high-speed visual inspections.
（Ｃ） 光ファイバ束から分岐した投光部はフレキシ
ブルな配置が可能であるので、被検査物が？′Ｓｊ雑な
表面形状をａする場合でも、その表面形状−に対応した
任意な位置からの均貴し！ｊｊ明が可能になる。(C) The light emitting section branched from the optical fiber bundle can be arranged flexibly, so it can be easily placed on the object to be inspected. 'Sj Even when processing a rough surface shape, it can be leveled from any position corresponding to the surface shape! jj light becomes possible.
（Ｄ） 光源と被検査物とは光ファイバ束を介して湘
：宥しているためりこ、被検査物が光源のクハの影響を
受けない。(D) Since the light source and the object to be inspected are connected via an optical fiber bundle, the object to be inspected is not affected by the influence of the light source.
（Ｅ） 光源の光を光ファイバ東で分岐させて多方向
から被検査１ｔＩ］にｑ＜ｉ明するので、光源の数が少
なくてすみ、経済的である。(E) Since the light from the light source is branched at the optical fiber east and illuminated from multiple directions to the object to be inspected (1tI), the number of light sources can be reduced, which is economical.
（Ｆ） ＪＲｉ査が簡！ｎであるため、製造が容易で
あり、低コストて製造できろ。(F) JRi inspection is easy! n, it is easy to manufacture and can be manufactured at low cost.
この発明の一実施例を第１図ないし第３図に基づいて説
明する。すなわち、この検査用照明装置は、第１図に示
すように、光源１の前面に光ファイバ束２の受光部３を
配置し、この光ファイバ束２を分岐させてつくった複数
の投光部４．・・・で被検査物ｍを多方向から照明する
とともに、光ファイバ束２の前記投光部４．・・・と前
記破）★介物ｍとの間にドーム状の拡散透光外部材５を
介在させたものである。An embodiment of the present invention will be described based on FIGS. 1 to 3. That is, as shown in FIG. 1, this inspection lighting device has a light receiving section 3 of an optical fiber bundle 2 disposed in front of a light source 1, and a plurality of light projecting sections made by branching the optical fiber bundle 2. 4. ... to illuminate the object m to be inspected from multiple directions, and the light projecting section 4 of the optical fiber bundle 2. A dome-shaped diffused light-transmitting outer member 5 is interposed between ... and the above-mentioned broken)★ insert m.
前記光源１としては、築光件の高い高算度ランプが好適
に使用可能であり、これにより光ファイバ東２の受光部
３に効率よく光を入射し、高速外観検査に必要な充分な
光量を得ることができる。As the light source 1, a high-density lamp with high luminosity can be suitably used, which allows light to efficiently enter the light-receiving section 3 of the optical fiber east 2, thereby providing a sufficient amount of light necessary for high-speed visual inspection. can be obtained.
光ファイバ束２は光源１からの光を減衰させることなく
高輝度な状部で被検査物ｍの表面に導くためのものであ
って、多数本の光ファイバを束ねて構成される。光ファ
イバ束２の分岐した複数の投光部４．・・・は光ファイ
バ束２が可撓性ををするために自由な立体配置が可能で
あり、被検査物ｍを多方向から照明することができると
ともに、（ｙ光量４・・・はコンパクトであるために被
検査物ｍの表面の照明バランスが崩れない程度に投光部
４゜・・・を被検査物ｍの近くまで接近させることが可
能である。このため、高輝度による均質照明が可能にな
る。The optical fiber bundle 2 is for guiding the light from the light source 1 to the surface of the object to be inspected m in a high-intensity shape without attenuating it, and is constructed by bundling a large number of optical fibers. A plurality of light projecting parts 4 into which the optical fiber bundle 2 is branched. Because the optical fiber bundle 2 is flexible, it can be arranged freely in three dimensions, and the object to be inspected m can be illuminated from multiple directions. Therefore, it is possible to bring the light projector 4° close to the object to be inspected m to the extent that the illumination balance on the surface of the object to be inspected m is not disrupted.Therefore, homogeneous illumination due to high brightness is possible. becomes possible.
前記拡散透光性部材５：よ、搬送装置のコンヘア６上を
）絞込される被検査物ｍの検査位置で被ｔ★金物ｍを覆
うような形で配置さγしたドーム状で構成される。拡散
透光性■５材５としては、たとえば通常のタイプ用紙の
ほか、透光性プラスチックノートやフィルムなどが使用
可能である。これらの拡散透光性部材５は光ファイバ束
２から出た光を拡散させ、被Ｉ★金物ｍの照明を均質化
させる。また、拡散透光性部材５は被検査％”Ｑ ｍ
７−ｉ’ｉうドーム形で１成されているので、拡散１光
外部材５を透過拡散して入射した光がドーム内面で反射
して被検査物ｍを間接照明するため、これによっても均
質照明に寄与することができる。かかるドーム形の拡散
透光性部材５の頂部にはのぞき窓となるス“７１ツト状
の孔７が形成され、上方にあるイメージセンサ８がこの
孔７を経て被検査物ｍを１像するように損成される。な
お、第１図に８いて、１０は被検査物ｍの通過口である
。The diffused translucent member 5: is arranged in a dome shape such that it covers the metal object m at the inspection position of the object m to be inspected (over the conhair 6 of the conveying device). Ru. As the material 5 for diffused translucency, for example, in addition to ordinary type paper, translucent plastic notebooks and films can be used. These diffused translucent members 5 diffuse the light emitted from the optical fiber bundle 2 and homogenize the illumination of the metal object m. In addition, the diffused light-transmitting member 5 has an inspection target %”Q m
7-i'i is formed in a dome shape, so that the light that has passed through and diffused through the outer material 5 is reflected on the inner surface of the dome and indirectly illuminates the object to be inspected. Can contribute to homogeneous illumination. A straight hole 7 serving as a viewing window is formed at the top of the dome-shaped diffused light-transmitting member 5, and an image sensor 8 located above takes an image of the object m to be inspected through this hole 7. In addition, in FIG. 1, reference numeral 8 and 10 indicate a passage port for the object to be inspected m.
第２図および第３図はそれぞれ光ファイバ束２の投光部
の立体配置の一例を示す平面図および正面図である。す
なわち、第２図および第３図では８本の投光部４ａ〜４
ｈが被１★査ｍｍの表面を均質に照明するような位置に
それぞれ配置されており、投光部４ａと４０は被検査物
ｍの上部表面を照明し、投光部４ｃと４ｇは被）★介物
ｍの上部側面を照明し、投光部４ｂ、４ｄ、４ｆおよび
４ｈは被検査物ｍの周辺ｍ１分を照明している。2 and 3 are a plan view and a front view, respectively, showing an example of the three-dimensional arrangement of the light projecting portion of the optical fiber bundle 2. FIG. That is, in FIGS. 2 and 3, there are eight light projecting units 4a to 4.
h are respectively arranged at such positions as to uniformly illuminate the surface of the object to be inspected 1★ mm, the light projectors 4a and 40 illuminate the upper surface of the object to be inspected m, and the light projectors 4c and 4g illuminate the surface of the object to be inspected m. ) * The upper side surface of the object m is illuminated, and the light projecting parts 4b, 4d, 4f and 4h illuminate the periphery m1 of the object m to be inspected.
投光部の数や配置は立体的な被検査物ｍの形状に応して
任意に設定可能であり、さら↓こ投光部から出る光量も
投光部と被検査ぜりｍとの刈隔距＾１を変えることによ
り（−ｉ：怠に調節可能である。これにより複雑な形状
の被）★介物ｍであっても均質照明が可能となる。The number and arrangement of the light projecting parts can be set arbitrarily according to the shape of the three-dimensional object to be inspected m, and the amount of light emitted from the light projecting part also depends on the ratio between the light projecting part and the inspected edge m. By changing the distance ^1 (-i: can be adjusted lazily. This makes it possible to provide homogeneous illumination even for a complex-shaped object m).
また、被検査物ｍの表面の輝度は、従来のＪＱ明ドーム
による間接照明方式に比べて数百倍も増大し、イメージ
センサ８であるラインセンサカメラによる高速外観検査
が可能となる。Furthermore, the brightness of the surface of the object to be inspected m is increased several hundred times compared to the conventional indirect illumination method using the JQ bright dome, and high-speed visual inspection using the line sensor camera, which is the image sensor 8, becomes possible.
なお、以上の実施（！１１では、拡散透光性部材として
ドーム状のものを使用したが、たとえば光ファイバ東２
の投光部４・・・の前面に拡散透光性部材才を直接取付
けたものであっても同様な光の拡散効果を得ることがで
きる。Note that in the above implementation (!11), a dome-shaped member was used as the diffused translucent member, but for example, the optical fiber east 2
A similar light diffusing effect can be obtained even if a diffusive translucent member is directly attached to the front surface of the light projecting section 4.
（発明の効果〕 この発明によれば、以下の効果がある。(Effect of the invention〕 According to this invention, there are the following effects.
（Ａ） 光ファイバ束の投光部を、被検査物の照明バ
ランスが崩れない程度に÷々検査物に近づけることがで
き、被検査物の表面を１Ａ１度にｌＩＪ＋明できる。(A) The light projecting part of the optical fiber bundle can be brought closer to the object to be inspected to the extent that the illumination balance of the object to be inspected is not disturbed, and the surface of the object to be inspected can be illuminated by 1A1 degree.
（Ｂ） 元ファイバ束を分岐させて複数の投光部を形
成し、この投光部で様々なＬ：ｔ’、 ’、’Ｅｔから
被検査物を照明するので均１ｑ明がつくりやすい、また
、投光部を出た光：ま拡散透光性部材を通過ず乙ことに
よって拡散され、被検査物をより一層均質にピ９明する
ことができ、上記（Ａ）と柑王って高速外観検査が可能
になる。(B) The original fiber bundle is branched to form a plurality of light projecting parts, and the light projecting parts illuminate the object to be inspected from various L:t', ','Et, making it easy to create uniform 1q light. In addition, the light emitted from the light projecting part is diffused by not passing through the diffused translucent member, and the object to be inspected can be illuminated even more uniformly. High-speed visual inspection becomes possible.
（Ｃ） 光ファイバ東から分岐した投光部はフレキシ
ブルな配置が可能であるので、被検査物が複稚な表面形
状を有する場合でも、その表面形状に対応した仔９な位
置からの均質照明が可能になる。(C) The light emitting section branching from the optical fiber east can be arranged flexibly, so even if the object to be inspected has a complex surface shape, it can provide uniform illumination from various positions corresponding to the surface shape. becomes possible.
（Ｄ） 光源と被検査物とは光ファイバ束を介して離
隔しているために、？、！検査物が光源の；ハの影響を
受けるのが少なくなる。(D) Since the light source and the object to be inspected are separated via the optical fiber bundle,? ,! The object to be inspected is less affected by the light source.
（Ｅ） 光源の光を光ファイバ十で分岐さセで多方向
から被検査物に照明するので、光源の故が少なくてすみ
、経済的である。(E) Since the light from the light source is split by optical fibers and illuminated on the object to be inspected from multiple directions, there is less damage to the light source and it is economical.
（Ｆ゛） 構造が簡ｆｌであるため、製造が容易であ
り、低コストで製造できる。(F゛) Since the structure is simple, it is easy to manufacture and can be manufactured at low cost.
第１図はこの発明の一人施１６１１を示す説明口１、第
２図および第３図は光ファイバ束の投光ｒｙｌ＋の立体
配置の一例を示す平面１ 、ＩＩおよび正面図、第４図
は通常の外観検査装置を示す説明図でｂも。
１・・・光源、２・・・光ファイバ束、３・・・受光缶
：、４４ａ〜４ｈ・・・投光部、５・・・拡散透光性ｕ
ｉζ材、ｍ・、。
被検査物
特許出）、類火 鐘紡株式会社
第１図FIG. 1 is an explanatory opening 1 showing a single-person application 1611 of the present invention, FIGS. 2 and 3 are plane views 1, II, and front views showing an example of the three-dimensional arrangement of the light emitting ryl+ of an optical fiber bundle, and FIG. b is an explanatory diagram showing a normal appearance inspection device. DESCRIPTION OF SYMBOLS 1...Light source, 2...Optical fiber bundle, 3...Light receiving can:, 44a-4h...Light emitter, 5...Diffuse translucency u
iζ material, m. Tested object patent issued), related fire Kanebo Co., Ltd. Figure 1
Claims (2)
数の分岐した投光部で被検査物を多方向から照明する光
ファイバ束と、この光ファイバ束の前記投光部と前記被
検査物との間に介在した拡散透光性部材とを備えた検査
用照明装置。(1) A light source, an optical fiber bundle in which a light receiving part is arranged in front of the light source and illuminates an object to be inspected from multiple directions with a plurality of branched light projecting parts; An inspection lighting device comprising a diffused light-transmitting member interposed between the inspection object and the object to be inspected.
底部に被検査物の通過口を有し、かつ拡散透光性部材の
外側近傍に複数の前記投光部を配置した特許請求の範囲
第（１）項記載の検査用照明装置。(2) the diffused translucent member is dome-shaped and has a hole at the top;
The inspection illumination device according to claim 1, further comprising a passage opening for the object to be inspected at the bottom, and a plurality of the light projecting sections arranged near the outside of the diffused light-transmitting member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61198320A JPH0678989B2 (en) | 1986-08-25 | 1986-08-25 | Inspection lighting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61198320A JPH0678989B2 (en) | 1986-08-25 | 1986-08-25 | Inspection lighting device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6353452A true JPS6353452A (en) | 1988-03-07 |
| JPH0678989B2 JPH0678989B2 (en) | 1994-10-05 |
Family
ID=16389154
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61198320A Expired - Lifetime JPH0678989B2 (en) | 1986-08-25 | 1986-08-25 | Inspection lighting device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0678989B2 (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0422845A2 (en) * | 1989-10-12 | 1991-04-17 | John Patrick Russell | System for inspecting bearing balls for defects |
| EP0456217A2 (en) * | 1990-05-11 | 1991-11-13 | Orbot Systems, Limited | Optical inspection apparatus and illumination system particularly useful therein |
| US5228109A (en) * | 1990-08-24 | 1993-07-13 | Matsushita Electric Industrial Co., Ltd. | Light beam heating apparatus and method utilizing a fiber optic cable with random fiber array |
| JP2002505010A (en) * | 1998-06-15 | 2002-02-12 | エレクトロ サイエンティフィック インダストリーズ、インコーポレーテッド | Multi-function inspection device for microelectronic components |
| JP2010261837A (en) * | 2009-05-08 | 2010-11-18 | Ikegami Tsushinki Co Ltd | Appearance inspection apparatus and appearance inspecting optical apparatus |
| WO2011071035A1 (en) * | 2009-12-11 | 2011-06-16 | 第一実業ビスウィル株式会社 | Appearance inspection device |
| JP2012052907A (en) * | 2010-09-01 | 2012-03-15 | Q P Corp | Apparatus and method for inspecting component in resin-made cap |
| WO2013069736A1 (en) * | 2011-11-09 | 2013-05-16 | 株式会社クボタ | Granule inspection device |
| JP2013101082A (en) * | 2011-11-09 | 2013-05-23 | Kubota Corp | Granular material inspection device |
| JP2014089119A (en) * | 2012-10-30 | 2014-05-15 | Kubota Corp | Granular material inspection device |
| JP2014089120A (en) * | 2012-10-30 | 2014-05-15 | Kubota Corp | Granular material inspection device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59119246A (en) * | 1982-12-24 | 1984-07-10 | Matsushita Electric Works Ltd | Lighting device for body to be inspected |
-
1986
- 1986-08-25 JP JP61198320A patent/JPH0678989B2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59119246A (en) * | 1982-12-24 | 1984-07-10 | Matsushita Electric Works Ltd | Lighting device for body to be inspected |
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0422845A2 (en) * | 1989-10-12 | 1991-04-17 | John Patrick Russell | System for inspecting bearing balls for defects |
| EP0456217A2 (en) * | 1990-05-11 | 1991-11-13 | Orbot Systems, Limited | Optical inspection apparatus and illumination system particularly useful therein |
| EP0456217A3 (en) * | 1990-05-11 | 1992-09-09 | Orbot Systems, Limited | Optical inspection apparatus and illumination system particularly useful therein |
| US5228109A (en) * | 1990-08-24 | 1993-07-13 | Matsushita Electric Industrial Co., Ltd. | Light beam heating apparatus and method utilizing a fiber optic cable with random fiber array |
| JP2002505010A (en) * | 1998-06-15 | 2002-02-12 | エレクトロ サイエンティフィック インダストリーズ、インコーポレーテッド | Multi-function inspection device for microelectronic components |
| JP2010261837A (en) * | 2009-05-08 | 2010-11-18 | Ikegami Tsushinki Co Ltd | Appearance inspection apparatus and appearance inspecting optical apparatus |
| JP5670915B2 (en) * | 2009-12-11 | 2015-02-18 | 第一実業ビスウィル株式会社 | Appearance inspection device |
| WO2011071035A1 (en) * | 2009-12-11 | 2011-06-16 | 第一実業ビスウィル株式会社 | Appearance inspection device |
| JP2012052907A (en) * | 2010-09-01 | 2012-03-15 | Q P Corp | Apparatus and method for inspecting component in resin-made cap |
| WO2013069736A1 (en) * | 2011-11-09 | 2013-05-16 | 株式会社クボタ | Granule inspection device |
| CN103907013A (en) * | 2011-11-09 | 2014-07-02 | 株式会社久保田 | Granule inspection device |
| KR20140083057A (en) * | 2011-11-09 | 2014-07-03 | 가부시끼 가이샤 구보다 | Granule inspection device |
| JP2013101082A (en) * | 2011-11-09 | 2013-05-23 | Kubota Corp | Granular material inspection device |
| CN103907013B (en) * | 2011-11-09 | 2016-12-28 | 株式会社久保田 | Coccoid checks device |
| JP2014089119A (en) * | 2012-10-30 | 2014-05-15 | Kubota Corp | Granular material inspection device |
| JP2014089120A (en) * | 2012-10-30 | 2014-05-15 | Kubota Corp | Granular material inspection device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0678989B2 (en) | 1994-10-05 |
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