JPS6353055U - - Google Patents

Info

Publication number
JPS6353055U
JPS6353055U JP14633386U JP14633386U JPS6353055U JP S6353055 U JPS6353055 U JP S6353055U JP 14633386 U JP14633386 U JP 14633386U JP 14633386 U JP14633386 U JP 14633386U JP S6353055 U JPS6353055 U JP S6353055U
Authority
JP
Japan
Prior art keywords
pinion
rack
circumferential direction
drive plate
engaged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14633386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14633386U priority Critical patent/JPS6353055U/ja
Publication of JPS6353055U publication Critical patent/JPS6353055U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Rollers For Roller Conveyors For Transfer (AREA)
  • Transmission Devices (AREA)
JP14633386U 1986-09-24 1986-09-24 Pending JPS6353055U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14633386U JPS6353055U (zh) 1986-09-24 1986-09-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14633386U JPS6353055U (zh) 1986-09-24 1986-09-24

Publications (1)

Publication Number Publication Date
JPS6353055U true JPS6353055U (zh) 1988-04-09

Family

ID=31058703

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14633386U Pending JPS6353055U (zh) 1986-09-24 1986-09-24

Country Status (1)

Country Link
JP (1) JPS6353055U (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010067591A1 (ja) * 2008-12-09 2010-06-17 キヤノンアネルバ株式会社 ラック・アンド・ピニオン機構、真空処理装置、ラック・アンド・ピニオン機構の駆動制御方法、駆動制御プログラム及び記録媒体

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010067591A1 (ja) * 2008-12-09 2010-06-17 キヤノンアネルバ株式会社 ラック・アンド・ピニオン機構、真空処理装置、ラック・アンド・ピニオン機構の駆動制御方法、駆動制御プログラム及び記録媒体
CN102245934A (zh) * 2008-12-09 2011-11-16 佳能安内华股份有限公司 齿条-小齿轮机构、真空处理装置、齿条-小齿轮机构的驱动控制方法、驱动控制程序及记录介质
JP5249351B2 (ja) * 2008-12-09 2013-07-31 キヤノンアネルバ株式会社 ラック・アンド・ピニオン機構、真空処理装置、ラック・アンド・ピニオン機構の駆動制御方法、駆動制御プログラム及び記録媒体

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