JPS6353055U - - Google Patents
Info
- Publication number
- JPS6353055U JPS6353055U JP14633386U JP14633386U JPS6353055U JP S6353055 U JPS6353055 U JP S6353055U JP 14633386 U JP14633386 U JP 14633386U JP 14633386 U JP14633386 U JP 14633386U JP S6353055 U JPS6353055 U JP S6353055U
- Authority
- JP
- Japan
- Prior art keywords
- pinion
- rack
- circumferential direction
- drive plate
- engaged
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005540 biological transmission Effects 0.000 claims description 5
- 230000007935 neutral effect Effects 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Rollers For Roller Conveyors For Transfer (AREA)
- Transmission Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14633386U JPS6353055U (he) | 1986-09-24 | 1986-09-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14633386U JPS6353055U (he) | 1986-09-24 | 1986-09-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6353055U true JPS6353055U (he) | 1988-04-09 |
Family
ID=31058703
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14633386U Pending JPS6353055U (he) | 1986-09-24 | 1986-09-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6353055U (he) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010067591A1 (ja) * | 2008-12-09 | 2010-06-17 | キヤノンアネルバ株式会社 | ラック・アンド・ピニオン機構、真空処理装置、ラック・アンド・ピニオン機構の駆動制御方法、駆動制御プログラム及び記録媒体 |
-
1986
- 1986-09-24 JP JP14633386U patent/JPS6353055U/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010067591A1 (ja) * | 2008-12-09 | 2010-06-17 | キヤノンアネルバ株式会社 | ラック・アンド・ピニオン機構、真空処理装置、ラック・アンド・ピニオン機構の駆動制御方法、駆動制御プログラム及び記録媒体 |
CN102245934A (zh) * | 2008-12-09 | 2011-11-16 | 佳能安内华股份有限公司 | 齿条-小齿轮机构、真空处理装置、齿条-小齿轮机构的驱动控制方法、驱动控制程序及记录介质 |
JP5249351B2 (ja) * | 2008-12-09 | 2013-07-31 | キヤノンアネルバ株式会社 | ラック・アンド・ピニオン機構、真空処理装置、ラック・アンド・ピニオン機構の駆動制御方法、駆動制御プログラム及び記録媒体 |