JPS6352486B2 - - Google Patents
Info
- Publication number
- JPS6352486B2 JPS6352486B2 JP19143686A JP19143686A JPS6352486B2 JP S6352486 B2 JPS6352486 B2 JP S6352486B2 JP 19143686 A JP19143686 A JP 19143686A JP 19143686 A JP19143686 A JP 19143686A JP S6352486 B2 JPS6352486 B2 JP S6352486B2
- Authority
- JP
- Japan
- Prior art keywords
- reflector
- pit
- surface wave
- surface acoustic
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 14
- 238000010897 surface acoustic wave method Methods 0.000 claims description 7
- 238000000034 method Methods 0.000 description 11
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000005530 etching Methods 0.000 description 7
- 239000010931 gold Substances 0.000 description 5
- 238000010884 ion-beam technique Methods 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 230000000737 periodic effect Effects 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005315 distribution function Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19143686A JPS6242607A (ja) | 1986-08-15 | 1986-08-15 | 弾性表面波共振器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19143686A JPS6242607A (ja) | 1986-08-15 | 1986-08-15 | 弾性表面波共振器 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP694378A Division JPS54100238A (en) | 1978-01-24 | 1978-01-24 | Elastic surface wave resonator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6242607A JPS6242607A (ja) | 1987-02-24 |
| JPS6352486B2 true JPS6352486B2 (US06858664-20050222-C00036.png) | 1988-10-19 |
Family
ID=16274587
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19143686A Granted JPS6242607A (ja) | 1986-08-15 | 1986-08-15 | 弾性表面波共振器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6242607A (US06858664-20050222-C00036.png) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0286382U (US06858664-20050222-C00036.png) * | 1988-12-21 | 1990-07-09 | ||
| JPH043083U (US06858664-20050222-C00036.png) * | 1990-04-25 | 1992-01-13 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6847272B2 (en) * | 2003-02-28 | 2005-01-25 | Northrop Grumman Corporation | Weighted SAW reflector using distributed acoustic reflective dots |
| JP2007286387A (ja) * | 2006-04-18 | 2007-11-01 | Kenwood Corp | 音響改善部材およびオーディオルーム |
-
1986
- 1986-08-15 JP JP19143686A patent/JPS6242607A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0286382U (US06858664-20050222-C00036.png) * | 1988-12-21 | 1990-07-09 | ||
| JPH043083U (US06858664-20050222-C00036.png) * | 1990-04-25 | 1992-01-13 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6242607A (ja) | 1987-02-24 |
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