JPS6352434A - Wafer external appearance inspecting apparatus - Google Patents

Wafer external appearance inspecting apparatus

Info

Publication number
JPS6352434A
JPS6352434A JP19534386A JP19534386A JPS6352434A JP S6352434 A JPS6352434 A JP S6352434A JP 19534386 A JP19534386 A JP 19534386A JP 19534386 A JP19534386 A JP 19534386A JP S6352434 A JPS6352434 A JP S6352434A
Authority
JP
Japan
Prior art keywords
defect
detecting sensitivity
external appearance
inspecting apparatus
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19534386A
Other languages
Japanese (ja)
Inventor
Yuzo Taniguchi
Toru Fukui
Mikito Saito
Hiroshi Nagaishi
Osamu Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP19534386A priority Critical patent/JPS6352434A/en
Publication of JPS6352434A publication Critical patent/JPS6352434A/en
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To make it possible to inspect a defect at a high speed without errone ously informing or missing the defect by providing a detecting sensitivity setter for suitably switching the defect detecting sensitivity at the time of inspecting.
CONSTITUTION: A detecting sensitivity setter 11 which can alter the detecting sensitivity by a microcomputer 12 is provided in a device for irradiating a light to a predetermined position of a wafer pattern to detect the reflected light thereby obtained to detect a defect. A fine pattern part is inspected by a high detecting sensitivity and a large pattern part is inspected by a relatively low detecting sensitivity. Thus, a wafer external appearance inspecting apparatus which less erroneously informs or misses the defect and can inspect it at a high speed can be obtained.
COPYRIGHT: (C)1988,JPO&Japio
JP19534386A 1986-08-22 1986-08-22 Wafer external appearance inspecting apparatus Granted JPS6352434A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19534386A JPS6352434A (en) 1986-08-22 1986-08-22 Wafer external appearance inspecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19534386A JPS6352434A (en) 1986-08-22 1986-08-22 Wafer external appearance inspecting apparatus

Publications (1)

Publication Number Publication Date
JPS6352434A true JPS6352434A (en) 1988-03-05

Family

ID=16339589

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19534386A Granted JPS6352434A (en) 1986-08-22 1986-08-22 Wafer external appearance inspecting apparatus

Country Status (1)

Country Link
JP (1) JPS6352434A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0278936A (en) * 1988-09-14 1990-03-19 Topcon Corp Surface inspection device
US5173719A (en) * 1989-12-20 1992-12-22 Hitachi, Ltd. Method and apparatus for the inspection of patterns
JPH07325044A (en) * 1995-06-09 1995-12-12 Dainippon Screen Mfg Co Ltd Pattern inspection apparatus for printed board
JP2007147376A (en) * 2005-11-25 2007-06-14 Nikon Corp Inspection device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0278936A (en) * 1988-09-14 1990-03-19 Topcon Corp Surface inspection device
US5173719A (en) * 1989-12-20 1992-12-22 Hitachi, Ltd. Method and apparatus for the inspection of patterns
JPH07325044A (en) * 1995-06-09 1995-12-12 Dainippon Screen Mfg Co Ltd Pattern inspection apparatus for printed board
JP2007147376A (en) * 2005-11-25 2007-06-14 Nikon Corp Inspection device

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