JPS6352255U - - Google Patents

Info

Publication number

JPS6352255U

JPS6352255U JP14501986U JP14501986U JPS6352255U JP S6352255 U JPS6352255 U JP S6352255U JP 14501986 U JP14501986 U JP 14501986U JP 14501986 U JP14501986 U JP 14501986U JP S6352255 U JPS6352255 U JP S6352255U

Authority

JP

Japan

Prior art keywords

vacuum

rotary

pump

foreline trap

foreline

Prior art date

1986-09-24

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1

Cited By (3)