JPS6351678U - - Google Patents
Info
- Publication number
- JPS6351678U JPS6351678U JP14469086U JP14469086U JPS6351678U JP S6351678 U JPS6351678 U JP S6351678U JP 14469086 U JP14469086 U JP 14469086U JP 14469086 U JP14469086 U JP 14469086U JP S6351678 U JPS6351678 U JP S6351678U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust
- chamber
- outside air
- damper
- common
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Manufacturing Of Printed Circuit Boards (AREA)
- Coating Apparatus (AREA)
Description
第１図乃至第５図は本考案の実施例を示し、第
１図は共通排気室周辺の縦断正面図、第２図は並
設回転処理装置の一部破断平面図、第３図は同装
置の一部破断正面図、第４図は第２図の―線
断面図、第５図は同装置の作動原理図、第６図は
従来技術を示す第５図相当図である。
１……基板、２……チヤンバー、３……回転体
、４……基板、６……排気管、８……排気室、１
５……排気出口、１８……共通排気室、１９……
排気連通口、２０……排気ダンパー、２１……駆
動源、３０……外気ダンパー、３２……外気連通
口。
Figures 1 to 5 show an embodiment of the present invention, with Figure 1 being a longitudinal sectional front view of the vicinity of the common exhaust chamber, Figure 2 being a partially cutaway plan view of the parallel rotary processing equipment, and Figure 3 being the same. FIG. 4 is a partially cutaway front view of the device, FIG. 4 is a sectional view taken along the line -- in FIG. 2, FIG. 5 is a diagram of the operating principle of the device, and FIG. 6 is a view equivalent to FIG. 1...Substrate, 2...Chamber, 3...Rotating body, 4...Substrate, 6...Exhaust pipe, 8...Exhaust chamber, 1
5...Exhaust outlet, 18...Common exhaust chamber, 19...
Exhaust communication port, 20... Exhaust damper, 21... Drive source, 30... Outside air damper, 32... Outside air communication port.
Claims (1)
基板に処理液を供給して回転処理をする回転処理
装置を複数台並設し、各回転処理装置の各チヤン
バーを各排気室に接続し、各排気室の排気出口を
共通排気室に連通し、共通排気室の排気出口を強
制排気手段に連結するとともに、各排気室から共
通排気室への各排気連通口にそれぞれ排気ダンパ
ーを並設して各チヤンバー内の空気の流れを制御
するように構成した並設回転処理装置において、
共通排気室に上記各排気連通口に対応して同数の
外気連通口を設け、各外気連通口に外気ダンパー
を並設し、それぞれの対応する外気ダンパーと排
気ダンパーとを駆動源に連結して両ダンパーを連
動可能に構成し、１つ又は複数の排気室を共通排
気室に連通すべく対応する排気ダンパーを上記駆
動源で開放制御すれば対応する外気ダンパーが外
気連通口を封鎖するようにし、かつ、１つ又は複
数の排気室を共通排気室から遮断するように対応
する排気ダンパーを封鎖制御すれば対応する外気
ダンパーが外気連通口を開放するようにしたこと
を特徴とする並設回転処理装置。 A plurality of rotary processing devices are installed in parallel in a chamber, and each chamber of each rotary processing device is connected to each exhaust chamber. The exhaust outlet of each exhaust chamber is connected to a common exhaust chamber, the exhaust outlet of the common exhaust chamber is connected to a forced exhaust means, and an exhaust damper is installed in parallel at each exhaust communication port from each exhaust chamber to the common exhaust chamber. In a side-by-side rotary processing device configured to control the air flow in each chamber by
The same number of outside air communication ports are provided in the common exhaust chamber corresponding to each of the above-mentioned exhaust communication ports, outside air dampers are arranged in parallel to each outside air communication port, and each corresponding outside air damper and exhaust damper are connected to a drive source. Both dampers are configured to be interlocked, and when the driving source controls the opening of the corresponding exhaust damper in order to communicate one or more exhaust chambers with the common exhaust chamber, the corresponding outside air damper closes the outside air communication port. , and the side-by-side rotation characterized in that when the corresponding exhaust damper is controlled to be closed so as to isolate one or more exhaust chambers from the common exhaust chamber, the corresponding outside air damper opens the outside air communication port. Processing equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14469086U JPH0448855Y2 (en) | 1986-09-19 | 1986-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14469086U JPH0448855Y2 (en) | 1986-09-19 | 1986-09-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6351678U true JPS6351678U (en) | 1988-04-07 |
| JPH0448855Y2 JPH0448855Y2 (en) | 1992-11-17 |
Family
ID=31055528
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14469086U Expired JPH0448855Y2 (en) | 1986-09-19 | 1986-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0448855Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04247638A (en) * | 1991-02-04 | 1992-09-03 | Nippon Telegr & Teleph Corp <Ntt> | Quick-disconnect carrier |
-
1986
- 1986-09-19 JP JP14469086U patent/JPH0448855Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04247638A (en) * | 1991-02-04 | 1992-09-03 | Nippon Telegr & Teleph Corp <Ntt> | Quick-disconnect carrier |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0448855Y2 (en) | 1992-11-17 |
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