JPS6350878U - - Google Patents
Info
- Publication number
- JPS6350878U JPS6350878U JP14414986U JP14414986U JPS6350878U JP S6350878 U JPS6350878 U JP S6350878U JP 14414986 U JP14414986 U JP 14414986U JP 14414986 U JP14414986 U JP 14414986U JP S6350878 U JPS6350878 U JP S6350878U
- Authority
- JP
- Japan
- Prior art keywords
- metal plate
- gas
- plate
- electrode
- power source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002184 metal Substances 0.000 claims 3
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
Landscapes
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986144149U JPH0336520Y2 (https=) | 1986-09-22 | 1986-09-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986144149U JPH0336520Y2 (https=) | 1986-09-22 | 1986-09-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6350878U true JPS6350878U (https=) | 1988-04-06 |
| JPH0336520Y2 JPH0336520Y2 (https=) | 1991-08-02 |
Family
ID=31054492
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986144149U Expired JPH0336520Y2 (https=) | 1986-09-22 | 1986-09-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0336520Y2 (https=) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5741367A (en) * | 1980-08-25 | 1982-03-08 | Fujitsu Ltd | Chemical vapor deposition device |
| JPS58163432A (ja) * | 1982-03-24 | 1983-09-28 | Fujitsu Ltd | プラズマ化学気相成長装置 |
-
1986
- 1986-09-22 JP JP1986144149U patent/JPH0336520Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5741367A (en) * | 1980-08-25 | 1982-03-08 | Fujitsu Ltd | Chemical vapor deposition device |
| JPS58163432A (ja) * | 1982-03-24 | 1983-09-28 | Fujitsu Ltd | プラズマ化学気相成長装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0336520Y2 (https=) | 1991-08-02 |