JPS6350878U - - Google Patents

Info

Publication number
JPS6350878U
JPS6350878U JP14414986U JP14414986U JPS6350878U JP S6350878 U JPS6350878 U JP S6350878U JP 14414986 U JP14414986 U JP 14414986U JP 14414986 U JP14414986 U JP 14414986U JP S6350878 U JPS6350878 U JP S6350878U
Authority
JP
Japan
Prior art keywords
metal plate
gas
plate
electrode
power source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14414986U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0336520Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986144149U priority Critical patent/JPH0336520Y2/ja
Publication of JPS6350878U publication Critical patent/JPS6350878U/ja
Application granted granted Critical
Publication of JPH0336520Y2 publication Critical patent/JPH0336520Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
JP1986144149U 1986-09-22 1986-09-22 Expired JPH0336520Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986144149U JPH0336520Y2 (enrdf_load_stackoverflow) 1986-09-22 1986-09-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986144149U JPH0336520Y2 (enrdf_load_stackoverflow) 1986-09-22 1986-09-22

Publications (2)

Publication Number Publication Date
JPS6350878U true JPS6350878U (enrdf_load_stackoverflow) 1988-04-06
JPH0336520Y2 JPH0336520Y2 (enrdf_load_stackoverflow) 1991-08-02

Family

ID=31054492

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986144149U Expired JPH0336520Y2 (enrdf_load_stackoverflow) 1986-09-22 1986-09-22

Country Status (1)

Country Link
JP (1) JPH0336520Y2 (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5741367A (en) * 1980-08-25 1982-03-08 Fujitsu Ltd Chemical vapor deposition device
JPS58163432A (ja) * 1982-03-24 1983-09-28 Fujitsu Ltd プラズマ化学気相成長装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5741367A (en) * 1980-08-25 1982-03-08 Fujitsu Ltd Chemical vapor deposition device
JPS58163432A (ja) * 1982-03-24 1983-09-28 Fujitsu Ltd プラズマ化学気相成長装置

Also Published As

Publication number Publication date
JPH0336520Y2 (enrdf_load_stackoverflow) 1991-08-02

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