JPS6350877U - - Google Patents

Info

Publication number
JPS6350877U
JPS6350877U JP14370386U JP14370386U JPS6350877U JP S6350877 U JPS6350877 U JP S6350877U JP 14370386 U JP14370386 U JP 14370386U JP 14370386 U JP14370386 U JP 14370386U JP S6350877 U JPS6350877 U JP S6350877U
Authority
JP
Japan
Prior art keywords
frequency oscillators
vapor phase
phase growth
growth apparatus
high frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14370386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14370386U priority Critical patent/JPS6350877U/ja
Publication of JPS6350877U publication Critical patent/JPS6350877U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP14370386U 1986-09-18 1986-09-18 Pending JPS6350877U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14370386U JPS6350877U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-09-18 1986-09-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14370386U JPS6350877U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-09-18 1986-09-18

Publications (1)

Publication Number Publication Date
JPS6350877U true JPS6350877U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-04-06

Family

ID=31053627

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14370386U Pending JPS6350877U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-09-18 1986-09-18

Country Status (1)

Country Link
JP (1) JPS6350877U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007138301A (ja) * 1998-10-07 2007-06-07 Lg Philips Lcd Co Ltd 薄膜成膜装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS592132B2 (ja) * 1979-07-04 1984-01-17 株式会社東芝 真空開閉器の操作装置
JPS6270579A (ja) * 1985-09-24 1987-04-01 Nec Corp 薄膜堆積方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS592132B2 (ja) * 1979-07-04 1984-01-17 株式会社東芝 真空開閉器の操作装置
JPS6270579A (ja) * 1985-09-24 1987-04-01 Nec Corp 薄膜堆積方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007138301A (ja) * 1998-10-07 2007-06-07 Lg Philips Lcd Co Ltd 薄膜成膜装置

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